A simple modeling of ferroelectric actuator based on phenomenological model

被引:0
作者
Nguyen, B. H. [1 ]
Zunic, M. [1 ]
Torri, G. B. [1 ]
Rochus, V. [1 ]
机构
[1] IMEC, Sensor & Actuator Technol Dept, B-3001 Leuven, Belgium
来源
2023 24TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS, EUROSIME | 2023年
关键词
Phenomenological; Ferroelectric; PZT; Micro-actuator; MECHANICAL CONSTITUTIVE RELATIONS; THERMODYNAMICAL FORMULATION; HYSTERESIS; BEHAVIOR;
D O I
10.1109/EuroSimE56861.2023.10100791
中图分类号
O414.1 [热力学];
学科分类号
摘要
This paper proposes a simplified phenomenological macroscopic model of a nonlinear ferroelectric actuator. The key ingredient of the proposed model is based on the assumption of direct relation between the irreversible strain and irreversible electric field, which not only reduces the number of internal variables but also facilitate finite element formulation. The model is implemented into a finite element framework, in which return mapping algorithm is employed to solve the evolution of internal variable, to simulate a micro-size ferroelectric actuator. Numerical results are compared with experimental data, demonstrating robustness of the proposed model for micro-actuator design.
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页数:5
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