Reliability Improvement and Effective Switching Layer Model of Thin-Film MoS2 Memristors

被引:36
作者
Huang, Yifu [1 ]
Gu, Yuqian [1 ]
Mohan, Sivasakthya [1 ,2 ]
Dolocan, Andrei D. [2 ]
Ignacio, Nicholas [1 ,2 ]
Kutagulla, Shanmukh [1 ]
Matthews, Kevin [2 ]
Londono-Calderon, Alejandra [4 ]
Chang, Yao-Feng [5 ]
Chen, Ying-Chen H. [6 ]
Warner, Jamie T. [2 ,3 ]
Pettes, Michael C. [4 ]
Lee, Jack [1 ]
Akinwande, Deji [1 ,2 ]
机构
[1] Univ Texas Austin, Microelect Res Ctr, Austin, TX 78758 USA
[2] Univ Texas Austin, Texas Mat Inst, Mat Sci & Engn Grad Program, Austin, TX 78712 USA
[3] Univ Texas Austin, Walker Dept Mech Engn, Austin, TX 78712 USA
[4] Los Alamos Natl Lab, Ctr Integrated Nanotechnol, Mat Phys & Applicat Div, Los Alamos, NM 87545 USA
[5] Intel Corp, Hillsboro, OR 97124 USA
[6] No Arizona Univ, Dept Elect & Comp Engn, Flagstaff, AZ 86011 USA
基金
美国国家科学基金会;
关键词
defect engineering; molybdenum disulfide; resistive switching; 2D materials; RRAM; HETEROSTRUCTURES; MECHANISMS; TRANSITION; ENDURANCE; CONTACTS; DEVICES;
D O I
10.1002/adfm.202214250
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
2D memristors have demonstrated attractive resistive switching characteristics recently but also suffer from the reliability issue, which limits practical applications. Previous efforts on 2D memristors have primarily focused on exploring new material systems, while damage from the metallization step remains a practical concern for the reliability of 2D memristors. Here, the impact of metallization conditions and the thickness of MoS2 films on the reliability and other device metrics of MoS2-based memristors is carefully studied. The statistical electrical measurements show that the reliability can be improved to 92% for yield and improved by approximate to 16x for average DC cycling endurance in the devices by reducing the top electrode (TE) deposition rate and increasing the thickness of MoS2 films. Intriguing convergence of switching voltages and resistance ratio is revealed by the statistical analysis of experimental switching cycles. An "effective switching layer" model compatible with both monolayer and few-layer MoS2, is proposed to understand the reliability improvement related to the optimization of fabrication configuration and the convergence of switching metrics. The Monte Carlo simulations help illustrate the underlying physics of endurance failure associated with cluster formation and provide additional insight into endurance improvement with device fabrication optimization.
引用
收藏
页数:10
相关论文
共 66 条
[1]   Random circuit breaker network model for unipolar resistance switching [J].
Chae, Seung Chul ;
Lee, Jae Sung ;
Kim, Sejin ;
Lee, Shin Buhm ;
Chang, Seo Hyoung ;
Liu, Chunli ;
Kahng, Byungnam ;
Shin, Hyunjung ;
Kim, Dong-Wook ;
Jung, Chang Uk ;
Seo, Sunae ;
Lee, Myoung-Jae ;
Noh, Tae Won .
ADVANCED MATERIALS, 2008, 20 (06) :1154-+
[2]   The Impact of Forming Temperature and Voltage on the Reliability of Filamentary RRAM [J].
Chen, G. Y. ;
Lee, F. M. ;
Lin, Y. Y. ;
Tseng, P. H. ;
Hsu, K. C. ;
Lee, D. Y. ;
Lee, M. H. ;
Lung, H. L. ;
Hsieh, K. Y. ;
Wang, K. C. ;
Lu, C. Y. ;
Wu, M. C. .
2019 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATION (VLSI-TSA), 2019,
[3]   Fermi-level depinning of 2D transition metal dichalcogenide transistors [J].
Chen, Ruo-Si ;
Ding, Guanglong ;
Zhou, Ye ;
Han, Su-Ting .
JOURNAL OF MATERIALS CHEMISTRY C, 2021, 9 (35) :11407-11427
[4]  
Chen YY, 2012, 2012 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM)
[5]   Balancing SET/RESET Pulse for > 1010 Endurance in HfO2/Hf 1T1R Bipolar RRAM [J].
Chen, Yang Yin ;
Govoreanu, Bogdan ;
Goux, Ludovic ;
Degraeve, Robin ;
Fantini, Andrea ;
Kar, Gouri Sankar ;
Wouters, Dirk. J. ;
Groeseneken, Guido ;
Kittl, Jorge A. ;
Jurczak, Malgorzata ;
Altimime, Laith .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2012, 59 (12) :3243-3249
[6]   Dual-Functional Hybrid Selectorless RRAM and Selection Device for Memory Array Application [J].
Chen, Ying-Chen ;
Lee, Jack ;
Lin, Chih-Yang .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2021, 68 (09) :4363-4367
[7]   Memory applications from 2D materials [J].
Chiang, Chin-Cheng ;
Ostwal, Vaibhav ;
Wu, Peng ;
Pang, Chin-Sheng ;
Zhang, Feng ;
Chen, Zhihong ;
Appenzeller, Joerg .
APPLIED PHYSICS REVIEWS, 2021, 8 (02)
[8]  
Choi Y. J., 2020, IEEE ACCESS, V8
[9]   Revealing the planar chemistry of two-dimensional heterostructures at the atomic level [J].
Chou, Harry ;
Ismach, Ariel ;
Ghosh, Rudresh ;
Ruoff, Rodney S. ;
Dolocan, Andrei .
NATURE COMMUNICATIONS, 2015, 6
[10]   Structural evolution and wear resistance of MoS2-Based lubricant films irradiated by heavy ions [J].
Duan, Zewen ;
Zhao, Xiaoyu ;
Qiao, Li ;
Zhao, Yunbiao ;
Fu, Engang ;
Wang, Peng ;
Liu, Weimin .
SURFACE & COATINGS TECHNOLOGY, 2019, 378