MINIATURIZED FLOW SENSOR BASED ON THERMAL FEEDBACK AND DIGITIZED POWER DISTRIBUTION

被引：2

作者：

Huang, Minghao ^{[1
]}

Izhar ^{[2
]}

Song, Xiangyu ^{[1
]}

Hong, Linze ^{[1
]}

Xu, Ruining ^{[1
]}

Xu, Wei ^{[1
,3
]}

机构：

[1] Shenzhen Univ, Shenzhen, Peoples R China

[2] Univ Penn, Philadelphia, PA 19104 USA

[3] State Key Lab Radio Frequency Heterogeneous Integ, Shenzhen, Peoples R China

来源：

2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2024年

基金：

中国国家自然科学基金;

关键词：

Thermal flow sensor; thermal feedback; digitized power distribution; MEMS; CMOS-Compatible;

D O I：

10.1109/MEMS58180.2024.10439422

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we have proposed a miniaturized flow sensor based on thermal feedback and digitized power distribution across two microheaters. The performance of the sensor has been verified by nitrogen (N-2) gas flow from -11 m/s to 11 m/s. Our findings show a significant improvement in sensitivity, which is 10.69 %/m/s, as compared to its counterpart using a simple thermal feedback strategy with voltage redistribution. Besides, our sensor achieved an excellent long-term (15 mins) signal stability with a sensor resolution of up to 7.5 mm/s. Notably, this sensor system maintains excellent sensitivity even at low signal amplification gains, indicating that this strategy will help enable highly robust solid-state flow sensor designs in the future.

引用

页码：817 / 820

页数：4

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