3D micro-structures for rarefied gas flow applications manufactured via two-photon-polymerization

被引：4

作者：

Zhang, Dingdong ^{[1
]}

Lopez-Quesada, Guillermo ^{[1
,2
]}

Bergdolt, Samuel ^{[2
,3
]}

Hengsbach, Stefan ^{[2
,3
]}

Bade, Klaus ^{[2
,3
]}

Colin, Stephane ^{[1
]}

Rojas-Cardenas, Marcos ^{[1
]}

机构：

[1] Univ Toulouse, Inst Clement Ader ICA, CNRS, ISAE SUPAERO,INSA,IMT Mines Albi,UPS, Toulouse, France

[2] Karlsruhe Inst Technol, Inst Microstruct Technol IMT, Eggenstein Leopoldshafen, Germany

[3] Karlsruhe Inst Technol, Karlsruhe Nano Micro Facil KNMFi, Eggenstein Leopoldshafen, Germany

来源：

VACUUM | 2023年 / 211卷

关键词：

Microfluidics; Microfabrication; Rarefied gas flows; Two-photon-polymerization; MASS-FLOW; MICRODEVICES; SENSORS; DESIGN; SLIP;

D O I：

10.1016/j.vacuum.2023.111915

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, the two-photon-polymerization (TPP) fabrication technique was employed to manufacture three-dimensional (3D) micro-structures suitable for confined rarefied gas flows. Four different micro-tubes of sim-ple geometry have been tested in vacuum conditions. The geometry of the micro-tubes was characterized via a focus-variation 3D optical measurement microscope, a digital microscope , an X-ray mu-tomography. Mass flow rate measurements of pressure-driven rarefied gas flows of nitrogen in slip and transition regimes were compared to theoretical values obtained via the kinetic theory of gases. The experimental measurements were realized via the constant volume technique. The good agreement obtained between experimental and numerical results proves the feasibility of using this fabrication technique to create well controlled 3D shaped microsystems for rarefied gas flows applications.

引用

页数：10

共 26 条

[1] Isothermal mass flow measurements in microfabricated rectangular channels over a very wide Knudsen range [J].