Visualization of geometric manufacturing errors in a 3-DOF mode localized structure for high-accuracy mass sensing

A visualization scheme of geometric manufacturing errors is proposed in coupled resonators. The basic idea is to determine manufacturing errors on each resonator by sweeping the frequency before and after adding a known stimulus, and further converting errors into stiffness and mass perturbations. The error correction is thus accomplished by decreasing the mode shape deviation from the equilibrium state. A localized three -coupled cantilever array with different length errors is taken as a typical example for both theoretical and experimental demonstrations. Firstly, the theoretical length deviation from the reference one caused by the manufacturing error is calculated around 0.017 % with more than 9000 samples. Secondly, with the proposed scheme, the effect of length errors on mass sensing is experimentally decreased by approximately one order of magnitude. The proposed visualization scheme is believed to be not only applicable to geometryfree coupled resonators for high -accuracy sensing, but also offers a potential detuning solution to further widen the sensing range for practical applications by up to twice as much.