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- [5] A multi-scale model for wafer surface evolution in chemical mechanical planarization (CMP) PROCEEDINGS OF THE 15TH INTERNATIONAL SYMPOSIUM ON ELECTROMACHINING, 2007, : 499 - 504
- [6] A wafer-scale material removal rate profile model for copper chemical mechanical planarization INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2011, 51 (05): : 395 - 403
- [9] A Physics-based Model of a HCCI Engine with Electric Mechanical Valves 2008 IEEE INTERNATIONAL CONFERENCE ON SUSTAINABLE ENERGY TECHNOLOGIES (ICSET), VOLS 1 AND 2, 2008, : 514 - 519