Materials and Sensing Mechanisms for High-Temperature Pressure Sensors: A Review

被引：14

作者：

Chen, Yankun ^{[1
]}

Xu, Qian ^{[1
]}

Zhang, Xiuqin ^{[1
]}

Kuang, Minxuan ^{[1
]}

机构：

[1] Beijing Inst Fash Technol, Beijing Key Lab Clothing Mat R&D & Assessment, Beijing Engn Res Ctr Text Nanofiber, Sch Mat Design & Engn, Beijing 100029, Peoples R China

来源：

IEEE SENSORS JOURNAL | 2023年 / 23卷 / 22期

关键词：

Temperature sensors; Pressure sensors; Sensors; Thermal stability; Piezoresistance; Temperature measurement; Silicon; Harsh environments; high temperature; pressure sensors; thermal stability; working mechanisms; 800; DEGREES-C; ELECTRICAL-PROPERTIES; COMPENSATION; ENVIRONMENT; SENSITIVITY; FABRICATION; PERFORMANCE; PRINCIPLES; DESIGN; HEALTH;

D O I：

10.1109/JSEN.2023.3323318

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

High-temperature pressure sensors can be widely used in industries with high-temperature working conditions, such as aerospace, automotive, petroleum industry, and fire protection. Pressure sensors with excellent sensing performance and high-temperature tolerance will have broad application prospects in harsh environments. This review summarizes the research progress of high-temperature pressure sensors from aspects ranging from materials and working mechanisms to temperature compensation methods. Finally, challenges and trends in the field are briefly discussed. It is expected to benefit the scientific research community and promote further research and applications of high-temperature sensors.

引用

页码：26910 / 26924

页数：15

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