Influence of annealing ambience on structural and piezoelectric properties of single crystal LiTaO3 thin film

The crystal-ion-slicing technology is a promising technology for fabricating high-quality single crystal piezo-electric thin films. This work attempted to investigate the influence of annealing ambience on the properties of LiTaO3 thin films fabricated by crystal-ion-slicing technology. Here, two 4-inch 42 degrees rotated Y-X propaga-tion LiTaO3 thin films were fabricated, as well as the LiTaO3 thin films were annealed in vacuum and O2 IP: 203.8.109.20 On Tue, 18 Apr 2023 14 50:31 environment, respectively. The results demonstrate that the LiTaO3 thin films annealed in O2 environment Copyright: American Scien f c Pub ishers possesses more homogeneous and denser structure and fewr defects. The Zratio of the resonators fabricated Delivered by Ingenta on the LiTaO3 thin films annealed in O2 environment is approximately 85.3 dB and the Q-factor reaches 5107, indicating the excellent piezoelectric properties of thin films.