Radiation hardness evaluation of ε-Ga2O3 thin-film devices under swift heavy ion irradiation

被引:27
作者
Yang, Yongtao [1 ,2 ]
Tang, Yuanjun [1 ,2 ,3 ,4 ]
Liu, Fanyu [3 ,4 ]
Wang, Lei [3 ,4 ]
Zhang, Fan [1 ,2 ]
Wang, Tiejun [1 ,2 ]
Shu, Lei [5 ]
Wu, Zhenping [1 ,2 ]
Zhu, Huiping [3 ,4 ]
Li, Bo [3 ,4 ]
Li, Danfeng [6 ]
机构
[1] Beijing Univ Posts & Telecommun, State Key Lab Informat Photon & Opt Commun, Beijing 100876, Peoples R China
[2] Beijing Univ Posts & Telecommun, Sch Sci, Beijing 100876, Peoples R China
[3] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
[4] Chinese Acad Sci, Key Lab Sci & Technol Silicon Devices, Beijing 100029, Peoples R China
[5] Beijing Microelect Technol Inst, Beijing 100076, Peoples R China
[6] City Univ Hong Kong, Dept Phys, Kowloon, Hong Kong, Peoples R China
基金
中国国家自然科学基金;
关键词
Swift heavy ion irradiation; epsilon-Ga2O3; Optoelectrical characteristics; Defect dynamics; Band structure; Radiation hardness; HIGH RESPONSIVITY; GALLIUM-OXIDE; KAPPA; RESISTANCE; DAMAGE;
D O I
10.1016/j.apsusc.2023.158583
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The ultra-wide band gap (similar to 4.9 eV) and extremely large breakdown field strength (similar to 8 MV/cm) enable epsilon-Ga2O3 as an ideal materials candidate for high-performance power devices and solar-blind photodetectors. For the purpose of deep space applications explorations, comprehensive study of the effects of particle irradiation on the lattice stability and electronic properties of epsilon-Ga2O3 are of pivotal importance. In this work, leveraging a unique Ta radiation source, we interrogate the radiation hardness of epsilon-Ga2O3 thin films after 1907 MeV Ta swift heavy ion (SHI) irradiation. Detailed characterizations of the structural and optical properties show that the morphology and lattice structure are disrupted, with an increase of the band gap. Additionally, X-ray photoelectron spectroscopy experiments combining density functional theory calculations corroborate extrinsic flux-induced high concentration defects in the film, which lead to truncated photo-response performance of the device. However, even upon irradiation with a fluence of 5 x 10(10) cm(-2), the overall performance of the device remains robust and substantial. This outstanding radiation hardness of epsilon-Ga2O3 thin films rationalizes their potential usage for space applications.
引用
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页数:8
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