Investigation of temperature dependant current transport mechanism in Ag/In2O3/p-Si/Al heterojunction

Employing the pulsed laser ablation technique nano-crystalline thin films of Indium oxide (In2O3) are deposited successfully on boron doped silicon substrate. The structural and morphological parameters of the films are investigated by using X-ray diffraction and atomic force microscopic (AFM) spectroscopy, respectively. The deposited films are the crystalline nanostructures with (400) as preferred diffraction peak and grain size of 56.56 nm approximately. The computed roughness (Rq) of In2O3 film is 1.02 nm. The AFM analysis validated the deposition of homo-geneous smooth In2O3 films with surface roughness of the order of nanometer. UV-vis spectros-copy was used to study the optical properties of the films. Greater than 80% transparency in visible region was exhibited by the films. The value of the optical band gap was found to be 3.89 eV. The electrical parameters dominating the mechanism of current transport in n-In2O3/p-Si heterojunction were explored by observing the temperature-dependent current-voltage (I-V) properties. In the temperature range of 80-300 K, the ideality factor and barrier height were found to be strongly temperature dependent. It was noticed that with the decrease in temperature there is increase in ideality factor whereas decrease in barrier height which confirm the interfacial imperfections and inhomogeniety in potential barrier height distributions. The temperature dependence of I-V data has revealed the existence of double Gaussian distribution of barrier heights with mean values of 0.85eV and 0.78eV with standard deviation of 0.014 V and 0.012 V respectively. The modified Richardson's plot gives the average barrier height and Richardson's coefficient as 0.86eV and 4.7 x 105 Am-2K-2 in the temperature range 300 K-180 K and 0.77eV and 5.2 x 105 Am-2K-2, respectively in the temperature range 160 K-80 K. The values of Richardson's constants are of the order of known theoretical value of 3.2 x 105 Am-2 K-2.