Optimal design of optomechanical uncooled infrared focal plane array with integrated metalens

Optomechanical uncooled infrared (IR) detectors based on the thermal deformation of bi-material micro-cantilever have proved of significant potential in the IR imaging fields. However, compared to other uncooled infrared detectors, the optomechanical type relies on the mechanical deformation of the thermomechanical cantilevers, which compete for space with the absorbers and isolation beams, resulting in limited sensitivity. By integrating a designed metalens, large deformation, high thermal isolation, and high effective fill factor can be achieved simultaneously. Several pixel designs of optomechanical uncooled IR focal plane array (FPA) with designed integrated metalens are evaluated and optimized through numerical simulation. High thermal conversion efficiency H=0.016 and thermomechanical sensitivity ST=0.264 mu m K-1 are simultaneously achieved with an inherent noise-equivalent temperature difference(NETD) value of 3.9 mK at the preset 60 mu m x 60 mu m pixels. Using Figure of Merit(FOM) as a comprehensive evaluation of NETD and response time, the optimized structure can be improved by up to 40% over the original structure.