共 20 条
Dielectric properties of SrTiO3/LaNiO3 composite structure prepared by "sol-gel" method
被引:1
作者:

Bian, Weibai
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机构:
Changzhou Inst Technol, Sch Photoelect Engn, Changzhou 213032, Jiangsu, Peoples R China
Xian Univ Technol, Adv Mat Anal & Test Ctr, Xian 710048, Peoples R China Changzhou Inst Technol, Sch Photoelect Engn, Changzhou 213032, Jiangsu, Peoples R China

Jia, Jiqiang
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h-index: 0
机构:
Changzhou Inst Technol, Sch Photoelect Engn, Changzhou 213032, Jiangsu, Peoples R China
Xian Univ Technol, Adv Mat Anal & Test Ctr, Xian 710048, Peoples R China Changzhou Inst Technol, Sch Photoelect Engn, Changzhou 213032, Jiangsu, Peoples R China

Zhang, Ruixuan
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h-index: 0
机构:
Changzhou Inst Technol, Sch Photoelect Engn, Changzhou 213032, Jiangsu, Peoples R China Changzhou Inst Technol, Sch Photoelect Engn, Changzhou 213032, Jiangsu, Peoples R China
机构:
[1] Changzhou Inst Technol, Sch Photoelect Engn, Changzhou 213032, Jiangsu, Peoples R China
[2] Xian Univ Technol, Adv Mat Anal & Test Ctr, Xian 710048, Peoples R China
基金:
中国国家自然科学基金;
关键词:
Sol-gel;
Relative dielectric constant;
Tunability;
Schottky barrier;
ELECTRICAL-PROPERTIES;
THIN-FILMS;
SRTIO3;
TEMPERATURE;
CAPACITOR;
D O I:
10.1016/j.ceramint.2022.10.310
中图分类号:
TQ174 [陶瓷工业];
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
In this work, Pt/SrTiO3(STO)/LaNiO3(LNO) and Pt/STO/Pt structures were fabricated on Si substrates using sol-gel method. Dielectric tunability characteristics of these two structures are investigated over temperature range of 300-80 K. As temperature decreases, relative dielectric constant and tunability of STO films in both structures increase linearly, while loss tangent (tan delta) decreases. STO prepared on LNO exhibits better crystallinity and dielectric tunability than that prepared on Pt. Furthermore, LNO top pole array with 0.2 mm diameter was prepared on STO/LNO using photosensitive sol-gel method, resulting in LNO/STO/LNO structure with symmetric electrode. Dielectric tunability tests reveal that, compared with Pt/STO/LNO structure, LNO/STO/LNO structure exhibits similar tunability, lower tan delta, higher figure-of-merit (FOM) values, and better tunability symmetry. Relative dielectric constant, tunability (350 kV/cm), and FOM are approximately 391, 60%, and 142.6 at 80 K, respectively. Further analysis shows that because of Schottky barrier at Pt/STO interface, the FOM and tunability symmetry of Pt/STO/LNO structure are worse than those of LNO/STO/LNO structure. These re-sults demonstrate that LNO electrode performs better than conventional inert metal electrodes.
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页码:7979 / 7986
页数:8
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共 20 条
[1]
Semiconductor flexoelectricity in graphite-doped SrTiO3 ceramics
[J].
Dai, Zhonghua
;
Guo, Shuxuan
;
Gong, Yun
;
Wang, Zhiguo
.
CERAMICS INTERNATIONAL,
2021, 47 (05)
:6535-6539

Dai, Zhonghua
论文数: 0 引用数: 0
h-index: 0
机构:
Xian Technol Univ, Shaanxi Prov Key Lab Thin Films Technol & Opt Tes, Xian 710032, Peoples R China Xian Technol Univ, Shaanxi Prov Key Lab Thin Films Technol & Opt Tes, Xian 710032, Peoples R China

Guo, Shuxuan
论文数: 0 引用数: 0
h-index: 0
机构:
Xian Technol Univ, Shaanxi Prov Key Lab Thin Films Technol & Opt Tes, Xian 710032, Peoples R China Xian Technol Univ, Shaanxi Prov Key Lab Thin Films Technol & Opt Tes, Xian 710032, Peoples R China

Gong, Yun
论文数: 0 引用数: 0
h-index: 0
机构:
Chongqing Univ, State Key Lab Mech Transmiss, Chongqing 400044, Peoples R China Xian Technol Univ, Shaanxi Prov Key Lab Thin Films Technol & Opt Tes, Xian 710032, Peoples R China

Wang, Zhiguo
论文数: 0 引用数: 0
h-index: 0
机构:
Chongqing Univ, State Key Lab Mech Transmiss, Chongqing 400044, Peoples R China Xian Technol Univ, Shaanxi Prov Key Lab Thin Films Technol & Opt Tes, Xian 710032, Peoples R China
[2]
Improved low frequency and microwave dielectric response in strontium titanate thin films grown by pulsed laser ablation
[J].
Dalberth, MJ
;
Stauber, RE
;
Price, JC
;
Rogers, CT
;
Galt, D
.
APPLIED PHYSICS LETTERS,
1998, 72 (04)
:507-509

Dalberth, MJ
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Colorado, Dept Phys, Boulder, CO 80309 USA Univ Colorado, Dept Phys, Boulder, CO 80309 USA

Stauber, RE
论文数: 0 引用数: 0
h-index: 0
机构: Univ Colorado, Dept Phys, Boulder, CO 80309 USA

Price, JC
论文数: 0 引用数: 0
h-index: 0
机构: Univ Colorado, Dept Phys, Boulder, CO 80309 USA

Rogers, CT
论文数: 0 引用数: 0
h-index: 0
机构: Univ Colorado, Dept Phys, Boulder, CO 80309 USA

Galt, D
论文数: 0 引用数: 0
h-index: 0
机构: Univ Colorado, Dept Phys, Boulder, CO 80309 USA
[3]
SrTiO3/BaTiO3 multilayers thin films for integrated tunable capacitors applications
[J].
Guigues, Benoit
;
Guillan, Julie
;
Defay, Emmanuel
;
Garrec, Pierre
;
Wolozan, David
;
Andre, Bernard
;
Laugier, Frederic
;
Pantel, Roland
;
Gagnard, Xavier
;
Aid, Marc
.
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY,
2007, 27 (13-15)
:3851-3854

Guigues, Benoit
论文数: 0 引用数: 0
h-index: 0
机构: CEA, LETI, F-38054 Grenoble, France

Guillan, Julie
论文数: 0 引用数: 0
h-index: 0
机构: CEA, LETI, F-38054 Grenoble, France

Defay, Emmanuel
论文数: 0 引用数: 0
h-index: 0
机构: CEA, LETI, F-38054 Grenoble, France

Garrec, Pierre
论文数: 0 引用数: 0
h-index: 0
机构: CEA, LETI, F-38054 Grenoble, France

Wolozan, David
论文数: 0 引用数: 0
h-index: 0
机构: CEA, LETI, F-38054 Grenoble, France

Andre, Bernard
论文数: 0 引用数: 0
h-index: 0
机构: CEA, LETI, F-38054 Grenoble, France

Laugier, Frederic
论文数: 0 引用数: 0
h-index: 0
机构: CEA, LETI, F-38054 Grenoble, France

Pantel, Roland
论文数: 0 引用数: 0
h-index: 0
机构: CEA, LETI, F-38054 Grenoble, France

Gagnard, Xavier
论文数: 0 引用数: 0
h-index: 0
机构: CEA, LETI, F-38054 Grenoble, France

Aid, Marc
论文数: 0 引用数: 0
h-index: 0
机构: CEA, LETI, F-38054 Grenoble, France
[4]
Preparation Of LaNiO3/SrTiO3/LaNiO3 capacitor structure through sol-gel process
[J].
Jia, Jiqiang
;
Zhao, Gaoyang
;
Lei, Li
;
Wang, Xin
.
CERAMICS INTERNATIONAL,
2016, 42 (08)
:9762-9768

Jia, Jiqiang
论文数: 0 引用数: 0
h-index: 0
机构:
Xian Univ Technol, Sch Mat Sci & Engn, 5 South Jinhua Rd, Xian 710048, Shaanxi, Peoples R China Xian Univ Technol, Sch Mat Sci & Engn, 5 South Jinhua Rd, Xian 710048, Shaanxi, Peoples R China

Zhao, Gaoyang
论文数: 0 引用数: 0
h-index: 0
机构:
Xian Univ Technol, Sch Mat Sci & Engn, 5 South Jinhua Rd, Xian 710048, Shaanxi, Peoples R China
Xian Univ Technol, Adv Mat Anal & Test Ctr, 5 South Jinhua Rd, Xian 710048, Shaanxi, Peoples R China Xian Univ Technol, Sch Mat Sci & Engn, 5 South Jinhua Rd, Xian 710048, Shaanxi, Peoples R China

Lei, Li
论文数: 0 引用数: 0
h-index: 0
机构:
Xian Univ Technol, Adv Mat Anal & Test Ctr, 5 South Jinhua Rd, Xian 710048, Shaanxi, Peoples R China Xian Univ Technol, Sch Mat Sci & Engn, 5 South Jinhua Rd, Xian 710048, Shaanxi, Peoples R China

Wang, Xin
论文数: 0 引用数: 0
h-index: 0
机构:
Xian Univ Technol, Sch Mat Sci & Engn, 5 South Jinhua Rd, Xian 710048, Shaanxi, Peoples R China Xian Univ Technol, Sch Mat Sci & Engn, 5 South Jinhua Rd, Xian 710048, Shaanxi, Peoples R China
[5]
Preparation of a finely patterned LaNiO3 film via chemical modification
[J].
Jia, Jiqiang
;
Zhao, Gaoyang
;
Wang, Xin
;
Lei, Li
.
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS,
2016, 27 (05)
:5211-5216

Jia, Jiqiang
论文数: 0 引用数: 0
h-index: 0
机构:
Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China

Zhao, Gaoyang
论文数: 0 引用数: 0
h-index: 0
机构:
Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
Xian Univ Technol, Adv Mat Anal & Test Ctr, Xian 710048, Peoples R China Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China

Wang, Xin
论文数: 0 引用数: 0
h-index: 0
机构:
Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China

Lei, Li
论文数: 0 引用数: 0
h-index: 0
机构:
Xian Univ Technol, Adv Mat Anal & Test Ctr, Xian 710048, Peoples R China Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
[6]
Improvement in performance of electrically tunable devices based on nonlinear dielectric SrTiO3 using a homoepitaxial LaAlO3 interlayer
[J].
Jia, QX
;
Findikoglu, AT
;
Reagor, D
;
Lu, P
.
APPLIED PHYSICS LETTERS,
1998, 73 (07)
:897-899

Jia, QX
论文数: 0 引用数: 0
h-index: 0
机构: Los Alamos Natl Lab, Superconduct Technol Ctr, Los Alamos, NM 87545 USA

Findikoglu, AT
论文数: 0 引用数: 0
h-index: 0
机构: Los Alamos Natl Lab, Superconduct Technol Ctr, Los Alamos, NM 87545 USA

Reagor, D
论文数: 0 引用数: 0
h-index: 0
机构: Los Alamos Natl Lab, Superconduct Technol Ctr, Los Alamos, NM 87545 USA

Lu, P
论文数: 0 引用数: 0
h-index: 0
机构: Los Alamos Natl Lab, Superconduct Technol Ctr, Los Alamos, NM 87545 USA
[7]
Dielectric, ferroelectric and piezoelectric properties of 100-oriented Pb0.4Sr0.6TiO3 thin film sputtered on LaNiO3 electrode
[J].
Lei, Xiuyun
;
Remiens, Denis
;
Sama, Nossikpendou
;
Chen, Ying
;
Mao, Chaoliang
;
Dong, Xianlin
;
Wang, Genshui
.
JOURNAL OF CRYSTAL GROWTH,
2012, 347 (01)
:15-18

Lei, Xiuyun
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China

Remiens, Denis
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Sci & Technol Lille, CNRS, UMR 8520, IEMN DOAE, F-59652 Villeneuve Dascq, France Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China

Sama, Nossikpendou
论文数: 0 引用数: 0
h-index: 0
机构:
Univ Sci & Technol Lille, CNRS, UMR 8520, IEMN DOAE, F-59652 Villeneuve Dascq, France Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China

Chen, Ying
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China

Mao, Chaoliang
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China

Dong, Xianlin
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China

Wang, Genshui
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China
[8]
Effects of LaNiO3 bottom electrode on structural and dielectric properties of CaCu3Ti4O12 films fabricated by sol-gel method
[J].
Li, Y. W.
;
Hu, Z. G.
;
Sun, J. L.
;
Meng, X. J.
;
Chu, J. H.
.
APPLIED PHYSICS LETTERS,
2008, 92 (04)

Li, Y. W.
论文数: 0 引用数: 0
h-index: 0
机构:
E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China

Hu, Z. G.
论文数: 0 引用数: 0
h-index: 0
机构:
E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China

Sun, J. L.
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China

Meng, X. J.
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China

Chu, J. H.
论文数: 0 引用数: 0
h-index: 0
机构:
E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China
Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China E China Normal Univ, Dept Elect Engn, Shanghai 200062, Peoples R China
[9]
Correlation between deep depletion and current-voltage saturation of SrTiO3 gate dielectric capacitor
[J].
Liu, CY
;
Tseng, TY
.
CERAMICS INTERNATIONAL,
2004, 30 (07)
:1101-1106

Liu, CY
论文数: 0 引用数: 0
h-index: 0
机构: Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu 300, Taiwan

Tseng, TY
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu 300, Taiwan Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu 300, Taiwan
[10]
Developing SrTiO3/TiO2 heterostructure nanotube array for photocatalytic fuel cells with improved efficiency and elucidating the effects of organic substrates (vol 427, 131602, 2022)
[J].
Lv, Xincong
;
Lam, Frank Leung-Yuk
;
Teoh, Wey Yang
;
Hu, Xijun
.
CHEMICAL ENGINEERING JOURNAL,
2022, 446

Lv, Xincong
论文数: 0 引用数: 0
h-index: 0
机构:
Hong Kong Univ Sci & Technol, Dept Chem & Biol Engn, Clear Water Bay, Hong Kong, Peoples R China Hong Kong Univ Sci & Technol, Dept Chem & Biol Engn, Clear Water Bay, Hong Kong, Peoples R China

Lam, Frank Leung-Yuk
论文数: 0 引用数: 0
h-index: 0
机构:
Hong Kong Univ Sci & Technol, Dept Chem & Biol Engn, Clear Water Bay, Hong Kong, Peoples R China Hong Kong Univ Sci & Technol, Dept Chem & Biol Engn, Clear Water Bay, Hong Kong, Peoples R China

Teoh, Wey Yang
论文数: 0 引用数: 0
h-index: 0
机构:
City Univ Hong Kong, Sch Energy & Environm, Kowloon, Tat Chee Ave, Hong Kong, Peoples R China
Univ New South Wales, Sch Chem Engn, Sydney 2052, Australia
Univ Malaya, Ctr Separat Sci & Technol, Dept Chem Engn, Kuala Lumpur 50603, Malaysia Hong Kong Univ Sci & Technol, Dept Chem & Biol Engn, Clear Water Bay, Hong Kong, Peoples R China

Hu, Xijun
论文数: 0 引用数: 0
h-index: 0
机构:
Hong Kong Univ Sci & Technol, Dept Chem & Biol Engn, Clear Water Bay, Hong Kong, Peoples R China Hong Kong Univ Sci & Technol, Dept Chem & Biol Engn, Clear Water Bay, Hong Kong, Peoples R China