Dielectric properties of SrTiO3/LaNiO3 composite structure prepared by "sol-gel" method

被引:1
作者
Bian, Weibai [1 ,2 ]
Jia, Jiqiang [1 ,2 ]
Zhang, Ruixuan [1 ]
机构
[1] Changzhou Inst Technol, Sch Photoelect Engn, Changzhou 213032, Jiangsu, Peoples R China
[2] Xian Univ Technol, Adv Mat Anal & Test Ctr, Xian 710048, Peoples R China
基金
中国国家自然科学基金;
关键词
Sol-gel; Relative dielectric constant; Tunability; Schottky barrier; ELECTRICAL-PROPERTIES; THIN-FILMS; SRTIO3; TEMPERATURE; CAPACITOR;
D O I
10.1016/j.ceramint.2022.10.310
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this work, Pt/SrTiO3(STO)/LaNiO3(LNO) and Pt/STO/Pt structures were fabricated on Si substrates using sol-gel method. Dielectric tunability characteristics of these two structures are investigated over temperature range of 300-80 K. As temperature decreases, relative dielectric constant and tunability of STO films in both structures increase linearly, while loss tangent (tan delta) decreases. STO prepared on LNO exhibits better crystallinity and dielectric tunability than that prepared on Pt. Furthermore, LNO top pole array with 0.2 mm diameter was prepared on STO/LNO using photosensitive sol-gel method, resulting in LNO/STO/LNO structure with symmetric electrode. Dielectric tunability tests reveal that, compared with Pt/STO/LNO structure, LNO/STO/LNO structure exhibits similar tunability, lower tan delta, higher figure-of-merit (FOM) values, and better tunability symmetry. Relative dielectric constant, tunability (350 kV/cm), and FOM are approximately 391, 60%, and 142.6 at 80 K, respectively. Further analysis shows that because of Schottky barrier at Pt/STO interface, the FOM and tunability symmetry of Pt/STO/LNO structure are worse than those of LNO/STO/LNO structure. These re-sults demonstrate that LNO electrode performs better than conventional inert metal electrodes.
引用
收藏
页码:7979 / 7986
页数:8
相关论文
共 20 条
[1]   Semiconductor flexoelectricity in graphite-doped SrTiO3 ceramics [J].
Dai, Zhonghua ;
Guo, Shuxuan ;
Gong, Yun ;
Wang, Zhiguo .
CERAMICS INTERNATIONAL, 2021, 47 (05) :6535-6539
[2]   Improved low frequency and microwave dielectric response in strontium titanate thin films grown by pulsed laser ablation [J].
Dalberth, MJ ;
Stauber, RE ;
Price, JC ;
Rogers, CT ;
Galt, D .
APPLIED PHYSICS LETTERS, 1998, 72 (04) :507-509
[3]   SrTiO3/BaTiO3 multilayers thin films for integrated tunable capacitors applications [J].
Guigues, Benoit ;
Guillan, Julie ;
Defay, Emmanuel ;
Garrec, Pierre ;
Wolozan, David ;
Andre, Bernard ;
Laugier, Frederic ;
Pantel, Roland ;
Gagnard, Xavier ;
Aid, Marc .
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2007, 27 (13-15) :3851-3854
[4]   Preparation Of LaNiO3/SrTiO3/LaNiO3 capacitor structure through sol-gel process [J].
Jia, Jiqiang ;
Zhao, Gaoyang ;
Lei, Li ;
Wang, Xin .
CERAMICS INTERNATIONAL, 2016, 42 (08) :9762-9768
[5]   Preparation of a finely patterned LaNiO3 film via chemical modification [J].
Jia, Jiqiang ;
Zhao, Gaoyang ;
Wang, Xin ;
Lei, Li .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2016, 27 (05) :5211-5216
[6]   Improvement in performance of electrically tunable devices based on nonlinear dielectric SrTiO3 using a homoepitaxial LaAlO3 interlayer [J].
Jia, QX ;
Findikoglu, AT ;
Reagor, D ;
Lu, P .
APPLIED PHYSICS LETTERS, 1998, 73 (07) :897-899
[7]   Dielectric, ferroelectric and piezoelectric properties of 100-oriented Pb0.4Sr0.6TiO3 thin film sputtered on LaNiO3 electrode [J].
Lei, Xiuyun ;
Remiens, Denis ;
Sama, Nossikpendou ;
Chen, Ying ;
Mao, Chaoliang ;
Dong, Xianlin ;
Wang, Genshui .
JOURNAL OF CRYSTAL GROWTH, 2012, 347 (01) :15-18
[8]   Effects of LaNiO3 bottom electrode on structural and dielectric properties of CaCu3Ti4O12 films fabricated by sol-gel method [J].
Li, Y. W. ;
Hu, Z. G. ;
Sun, J. L. ;
Meng, X. J. ;
Chu, J. H. .
APPLIED PHYSICS LETTERS, 2008, 92 (04)
[9]   Correlation between deep depletion and current-voltage saturation of SrTiO3 gate dielectric capacitor [J].
Liu, CY ;
Tseng, TY .
CERAMICS INTERNATIONAL, 2004, 30 (07) :1101-1106
[10]   Developing SrTiO3/TiO2 heterostructure nanotube array for photocatalytic fuel cells with improved efficiency and elucidating the effects of organic substrates (vol 427, 131602, 2022) [J].
Lv, Xincong ;
Lam, Frank Leung-Yuk ;
Teoh, Wey Yang ;
Hu, Xijun .
CHEMICAL ENGINEERING JOURNAL, 2022, 446