Development of Femtosecond Laser Direct-Writing Optical Waveguide Devices in Flexible PDMS

被引:3
作者
Chen Zhi [1 ]
Zhong Lijing [1 ]
Chen Mengjia [1 ,2 ]
Wang Yuying [1 ]
Liu Xiaofeng [2 ]
Ma Zhijun [1 ]
Qiu Jianrong [3 ]
机构
[1] Zhejiang Lab, Hangzhou 311100, Zhejiang, Peoples R China
[2] Zhejiang Univ, Sch Mat Sci & Engn, Hangzhou 310027, Zhejiang, Peoples R China
[3] Zhejiang Univ, Coll Opt Sci & Engn, Hangzhou 310027, Zhejiang, Peoples R China
关键词
femtosecond laser direct-writing; flexible PDMS; Type-I optical waveguide; optical waveguide device; FUSED-SILICA; ELEMENT DISTRIBUTION; FICTIVE TEMPERATURE; LITHIUM-NIOBATE; GLASS; FABRICATION; WRITTEN; FIBER; INDEX; POLARIZATION;
D O I
10.3788/LOP231376
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The femtosecond laser direct-writing technique has been extensively explored for fabricating three-dimensional optical waveguide devices in transparent, hard, and fragile materials owing to its ultrashort pulse duration, ultrahigh peak power, high manufacturing precision, and efficiency. Recently, there is a growing interest in producing optical waveguide devices in flexible polydimethylsiloxane ( PDMS) using the femtosecond laser direct-writing technique. This study reviewed the latest development in femtosecond laser direct-writing Type-I optical waveguide devices in flexible PDMS, focusing on three aspects: the basic principle of different kinds of optical waveguide written by femtosecond laser; materials design, direct-writing principle, and processing technology of Type-I optical waveguide directly-written by femtosecond laser in flexible PDMS in last five years; and research progress of the application of the optical waveguide devices in flexible PDMS based on femtosecond laser direct-writing technique for diffraction gratings and cochlear endoscope. Finally, herein, the research progress in this field is summarized, analyzed and concluded, and the future research, application, and developmental direction are outlined.
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页数:13
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