A FLEXIBLE ORIGAMI OPTO-ELECTRO ARRAY FOR IN VIVO OPTOGENETIC NEUROSTIMULATION AND NEUROPHYSIOLOGY RECORDING

被引:0
|
作者
Gong, Yan [1 ,4 ]
Liu, Xiang [2 ,4 ]
Liu, Yifan [1 ,4 ]
Qiu, Zhen [3 ,4 ]
Weber, Arthur [5 ]
Li, Wen [1 ,4 ]
机构
[1] Michigan State Univ, Dept Elect & Comp Engn, E Lansing, MI USA
[2] Michigan State Univ, Dept Physiol, Neurosci Program, E Lansing, MI 48824 USA
[3] Michigan State Univ, Dept Biomed Engn, E Lansing, MI USA
[4] Michigan State Univ, Inst Quantitat Hlth Sci & Engn, E Lansing, MI USA
[5] Michigan State Univ, Dept Physiol, E Lansing, MI USA
基金
美国国家科学基金会;
关键词
Foldable probe; 2D to 3D conversion; opto-electro array; bridge plus trench" structure;
D O I
10.1109/MEMS58180.2024.10439312
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports a thin-film, three-dimensional (3D) opto-electro array with four individually addressable microscale light-emitting diodes (mu-LEDs) capable of surface illumination of the cortex and nine penetrating electrodes for simultaneous recording of light-evoked neural activities. Inspired by the origami concept, a carefully designed "bridge + trench" structure facilitates the conversion of the array from two-dimensional (2D) to 3D while avoiding mechanical damage to thin film metal. Before device transformation, the shape and dimensions of the 2D array can be customized, making it versatile for a variety of applications. The array is packaged using polyimide (PI) and polydimethylsiloxane (PDMS) to ensure the device's mechanical flexibility and biocompatibility. The efficacy of the device is characterized both in vitro and in vivo.
引用
收藏
页码:240 / 244
页数:5
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