Revealing the adhesion, stability, and electronic structure of SiC/M (M=Au, Pt) interface: A first-principles study

被引:10
作者
Wu, Wei [1 ]
Lu, Yanli [1 ]
Xu, Jinhan [1 ]
Li, Yan [1 ]
Wu, Chan [1 ]
Jiang, Jialiang [1 ]
Yang, Wenqing [1 ]
机构
[1] Northwestern Polytech Univ, State Key Lab Solidificat Proc, YouyiXi Rd 127, Xian 710072, Peoples R China
基金
国家重点研发计划; 中国国家自然科学基金;
关键词
SiC; M interface; Work of adhesion; Electronic structure; First-principles; SCHOTTKY CONTACTS; SILICON-CARBIDE; POWER; DEVICES;
D O I
10.1016/j.vacuum.2023.112143
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The interface bonding and electronic properties between SiC and metal are the key factors affecting the physical transport phenomena of metal-semiconductor field-effect transistors (MESFETs). The work of adhesion, interface energy and electronic structure of SiC/M (M = Au, Pt) interface are explored by first-principles method. Forty possible interface models were constructed for different surfaces and stacking positions, and the four most stable interfaces were screened based on the work of adhesion and interface energy. Moreover, the interfacial bonding behavior and strength of SiC/M were quantitatively and qualitatively described through partial density of states (PDOS), crystal orbital Hamilton population curves (COHP), and charge density distribution (CDD). The PDOS demonstrated covalent bond characteristics between M -Si and M -C, which are primarily bonded by M-d and Si-p or C-p orbital hybridization. Further, the COHP and CDD analyses clearly manifested that the Pt-C bond at the interface exhibits more pronounced electron aggregation and greater bonding strength than the Au-C bond. This study offers a comprehensive understanding of the interfacial bonding strength between SiC and Au or Pt and demonstrate that SiC/Pt contact is the more favorable option for electronic device materials.
引用
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页数:11
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共 43 条
  • [1] Surface energy of Si(110)- and 3C-SiC(111)-terminated surfaces
    Abavare, Eric K. K.
    Iwata, Jun-Ichi
    Yaya, Abu
    Oshiyama, Atsushi
    [J]. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2014, 251 (07): : 1408 - 1415
  • [2] Ab initio investigation of Al/Mo2B interfacial adhesion
    Abdelkader, H. Si
    Faraoun, H. I.
    [J]. COMPUTATIONAL MATERIALS SCIENCE, 2011, 50 (03) : 880 - 885
  • [3] Fabrication and characterization of field-plated buried-gate SiC MESFETs
    Andersson, Kristoffer
    Sudow, Mattias
    Nilsson, Per-Ake
    Sveinbjornsson, Einar
    Hjelmgren, Hans
    Nilsson, Joakim
    Stahl, Johan
    Zirath, Herbert
    Rorsman, Niklas
    [J]. IEEE ELECTRON DEVICE LETTERS, 2006, 27 (07) : 573 - 575
  • [4] Banc C., 2000, PHOTON EMISSION MECH, P695
  • [5] INVESTIGATION OF THE STRUCTURE AND STABILITY OF THE PT/SIC(001) INTERFACE
    BERMUDEZ, VM
    KAPLAN, R
    [J]. JOURNAL OF MATERIALS RESEARCH, 1990, 5 (12) : 2882 - 2893
  • [6] Improvements in Pt-based Schottky contacts to 3C-SiC
    Constantinidis, G
    Pecz, B
    Tsagaraki, K
    Kayambaki, M
    Michelakis, K
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1999, 61-2 : 406 - 410
  • [7] Silicon Carbide as a Platform for Power Electronics
    Eddy, C. R., Jr.
    Gaskill, D. K.
    [J]. SCIENCE, 2009, 324 (5933) : 1398 - 1400
  • [8] Eriksson Jens, 2010, Diffusion and Defect Data Part B (Solid State Phenomena), V156-8, P331, DOI 10.4028/www.scientific.net/SSP.156-158.331
  • [9] Nanoscale characterization of electrical transport at metal/3C-SiC interfaces
    Eriksson, Jens
    Roccaforte, Fabrizio
    Reshanov, Sergey
    Leone, Stefano
    Giannazzo, Filippo
    LoNigro, Raffaella
    Fiorenza, Patrick
    Raineri, Vito
    [J]. NANOSCALE RESEARCH LETTERS, 2011, 6 : 1 - 5
  • [10] Eriksson J, 2010, AIP CONF PROC, V1292, P75, DOI 10.1063/1.3518315