Low dielectric post-cured benzocyclobutene-functionalized fluorine-containing polyimide material

被引:24
作者
He, Jianhao [1 ]
Wu, Xueliang [1 ]
Cheng, Yuanrong [1 ]
机构
[1] Fudan Univ, Dept Mat Sci, 2005 Songhu Rd, Shanghai 200438, Peoples R China
基金
中国国家自然科学基金;
关键词
Fluorinated polyimide; Benzocyclobutene; Post; -cure; Low dielectric constant; Thermostability;
D O I
10.1016/j.eurpolymj.2023.112334
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Low dielectric constant (Dk) polyimide polymer materials are one of most attractive materials for their importance in microelectronic industries, such as high speed communication field. Herein, a novel benzocyclobutene (BCB) and trifluoromethyl functionalized diamine monomer (BFDA) was synthesized and used to prepare a series of co-polyimides with different BCB content (PI-BFs). Both trifluoromethyl and BCB structure can facilitate to low down Dk and dissipation factor (Df). For the cured PI-BFs, dielectric property test showed that the dielectric constant decreased significantly with the increase of BCB content, and the dielectric constant of PI-BF40% could reach 2.72 at 1 MHz. Besides, BCB can also contribute to improve glass transition temperature and initial storage modulus of PI-BFs. The Tg of PI-BF40% was 360 degrees C, and the initial storage modulus reached 2.83 GPa. Meanwhile, TMA test indicates that the post-curing by BCB group contributes to enhance the thermo-size stability. Moreover, PI-BFs show excellent thermal stability (Td5 > 499 degrees C), good transparency and low water uptake.
引用
收藏
页数:10
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