[1] Peking Univ, Sch Integrated Circuits, Natl Key Lab Adv Micro & Nano Manufacture Technol, Beijing 100871, Peoples R China
[2] Peking Univ, Beijing Sci & Engn Ctr Nanocarbons, Acad Adv Interdisciplinary Studies, Beijing 100871, Peoples R China
[3] Beijing Graphene Inst, Beijing 100095, Peoples R China
[4] Beijing Adv Innovat Ctr Integrated Circuits, Beijing 100871, Peoples R China