Microstructures and mechanical properties of Sb-doped ZnO thin films deposited on a-plane sapphire substrates

被引：4

作者：

Chen, Hou-Guang ^{[1
]}

Le, Phuoc Huu ^{[2
]}

Teng, I-Ju ^{[3
]}

Hu, Yu-Min ^{[4
]}

Lin, Chih-Ming ^{[5
]}

Chou, Wu-Ching ^{[6
]}

Juang, Jenh-Yih ^{[6
]}

Jian, Sheng-Rui ^{[1
,4
,7
]}

机构：

[1] I Shou Univ, Dept Mat Sci & Engn, Kaohsiung 84001, Taiwan

[2] Ming Chi Univ Technol, Ctr Plasma & Thin Film Technol, New Taipei City, Taiwan

[3] Natl Taiwan Univ Sci & Technol, Coll Engn, Taipei City 106335, Taiwan

[4] Natl Univ Kaohsiung, Dept Appl Phys, Kaohsiung 81148, Taiwan

[5] Natl Tsing Hua Univ, Dept Phys, Hsinchu 30013, Taiwan

[6] Natl Yang Ming Chiao Tung Univ, Dept Electrophys, Hsinchu 30010, Taiwan

[7] Kaohsiung Med Univ, Coll Pharm, Dept Fragrance & Cosmet Sci, 100 Shi Chuan 1st Rd, Kaohsiung 80708, Taiwan

来源：

CERAMICS INTERNATIONAL | 2024年 / 50卷 / 01期

关键词：

Handling Editor: Dr P. Vincenzini; Sb-doped ZnO thin films; XRD; XPS; Nanoindentation; Pop; -in; Hardness; NANOMECHANICAL PROPERTIES; LOW-TEMPERATURE; NANOINDENTATION; INDENTATION; FRACTURE; HARDNESS; SILICON; GROWTH;

D O I：

10.1016/j.ceramint.2023.10.139

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The structural features and nanomechanical properties of ZnO and Sb-doped (1.0 at%) ZnO (SbZO) thin films deposited on a-plane sapphire substrates by radio-frequency (RF) magnetron sputtering are comparatively investigated in this study. The X-ray diffraction and atomic force microscopy analyses indicated that both ZnO and SbZO thin films were highly (002)-oriented albeit with somewhat different grain structure and surface morphologies. Nanoindentation results of both films exhibited apparent discontinuities (so-called pop-ins) in the load-displacement curves (P-h curves), while no discontinuity was observed in the unloading segment of the P-h curves. By using a Berkovich nanoindenter operating with the continuous contact stiffness measurement mode, the obtained hardness and Young's modulus of ZnO (SbZO) thin films are 7.3 +/- 0.2 (8.5 +/- 0.4) GPa and 259.6 +/- 17.8 (327.4 +/- 13.9) GPa, respectively. Furthermore, the facture toughness and fracture energy of ZnO and SbZO thin films obtained by Vickers indentation were also compared.

引用

页码：614 / 621

页数：8

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