Ultrasmooth Epitaxial Pt Thin Films Grown by Pulsed Laser Deposition

被引:4
作者
Torres-Castanedo, Carlos G. [1 ]
Buchholz, D. Bruce [1 ]
Pham, Thang [1 ]
Zheng, Liyang [1 ]
Cheng, Matthew [1 ]
Dravid, Vinayak P. [1 ,2 ]
Hersam, Mark C. [1 ,3 ,4 ]
Bedzyk, Michael J. [1 ,5 ]
机构
[1] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[2] Northwestern Univ, Atom & Nanoscale Characterizat Expt Ctr NUANCE, Evanston, IL 60208 USA
[3] Northwestern Univ, Dept Chem, Evanston, IL 60208 USA
[4] Northwestern Univ, Dept Elect & Comp Engn, Evanston, IL 60208 USA
[5] Northwestern Univ, Dept Phys & Astron, Evanston, IL 60208 USA
基金
美国国家科学基金会;
关键词
platinum; pulsed laser deposition; epitaxy; lithium manganese oxide; lithium-ionbattery; 4D-STEM; BASAL-PLANE SAPPHIRE; PLATINUM FILMS; X-RAY; SURFACE-MORPHOLOGY; MOLECULAR-BEAM; TEMPERATURE; PT(111); ELECTRODES; CAPACITORS; QUALITY;
D O I
10.1021/acsami.3c16065
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Platinum (Pt) thin films are useful in applications requiring high-conductivity electrodes with excellent thermal and chemical stability. Ultrasmooth and epitaxial Pt thin films with single-crystalline domains have the added benefit of providing ideal templates for the subsequent growth of heteroepitaxial structures. Here, we grow epitaxial Pt (111) electrodes (ca. 30 nm thick) on sapphire (alpha-Al2O3 (0001)) substrates with pulsed laser deposition. This versatile technique allows control of the growth process and fabrication of films with carefully tailored parameters. X-ray scattering, atomic-force microscopy, and electron microscopy provide structural characterization of the films. Various gaseous atmospheres and temperatures were explored to achieve epitaxial growth of films with low roughness. A two-step (500 degrees C/300 degrees C) growth process was developed, yielding films with improved epitaxy without compromising roughness. The resulting films possess ultrasmooth interfaces (<3 & Aring;) and high electrical conductivity (6.9 x 10(6) S/m). Finally, Pt films were used as current collectors and templates to grow lithium manganese oxide (LiMn2O4 (111)) epitaxial thin films, a cathode material used in Li-ion batteries. Using a solid-state ionogel electrolyte, the films were highly stable when electrochemically cycled in the 3.5-4.3 V vs Li/Li+ range.
引用
收藏
页码:1921 / 1929
页数:9
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