High-precision detection method for an object edge based on a position-sensitive detector

被引：1

作者：

Zhai, Yusheng ^{[1
,2
]}

Zhao, Yiheng ^{[1
,2
]}

Yan, Saisai ^{[3
]}

Zhang, Zhifeng ^{[1
,2
]}

Geng, Lijie ^{[1
,2
]}

Zhang, Ruiliang ^{[1
,2
]}

Yang, Kun ^{[1
,2
]}

Kuang, Cuifang ^{[4
]}

机构：

[1] Zhengzhou Univ Light Ind, Sch Phys & Elect Engn, Zhengzhou 450000, Peoples R China

[2] Zhengzhou Univ Light Ind, Henan Key Lab Magnetoelectron Informat Funct Mat, Zhengzhou 450000, Peoples R China

[3] Beijing Inst Technol, Sch Opt & Photon, Beijing 102445, Peoples R China

[4] Zhejiang Univ, Coll Opt Sci & Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310063, Peoples R China

来源：

APPLIED OPTICS | 2023年 / 62卷 / 07期

基金：

中国国家自然科学基金;

关键词：

DIFFERENTIAL CONFOCAL MICROSCOPY; ENHANCEMENT;

D O I：

10.1364/AO.482605

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The paper proposed and verified a method of object edge detection based on the innovative defect spot working mode of the position-sensitive detector (PSD). With the output characteristics of the PSD in the defect spot mode and the size transformation properties of a focused beam, edge-detection sensitivity could be improved. Calibration experiments with the piezoelectric transducer (PZT) and object edge-detection experiments indicate that the object edge-detection sensitivity and accuracy of our method could reach 1 and 20 nm, respectively. Therefore, this method can be widely used in high-precision alignment, geometric parameters measurement, and other fields. (c) 2023 Optica Publishing Group

引用

页码：1815 / 1821

页数：7

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