High efficiency GHz laser processing with long bursts

被引：15
作者：
Audouard, Eric [1 ]
Mottay, Eric [1 ]
机构：
[1] Amplitude, Pessac, France
来源：
INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING | 2023年 / 5卷 / 01期
关键词：
femtosecond laser; temporal pulses shaping; GHz bursts; femtosecond processing; HIGH-POWER; PHASE EXPLOSION; FS LASERS; FEMTOSECOND; ABLATION; MODE; DYNAMICS; SILICON; PULSES;
D O I：
10.1088/2631-7990/aca79f
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Bursts of GHz repetition rate pulses involve more ablation mechanisms than single femtosecond pulses. Efficient ablation by GHz laser pulses is a multi-step process, consisting of a first thermal incubation phase, followed by a highly efficient ablation phase. GHz ablation therefore combines thermal and non-thermal ablation mechanisms. With an optimal choice of the burst duration, the ablation efficiency can be highly enhanced. Long bursts, comprising tens of pulses to hundreds of pulses, are needed to take full advantage of the increase in ablation efficiency.
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收藏
页数：9
相关论文
共 49 条
[1]   Femtosecond and picosecond laser drilling of metals at high repetition rates and average powers [J].
Ancona, A. ;
Doering, S. ;
Jauregui, C. ;
Roeser, F. ;
Limpert, J. ;
Nolte, S. ;
Tuennermann, A. .
OPTICS LETTERS, 2009, 34 (21) :3304-3306
[2]  
Audouard E., 2019, French Patent, Patent No. [n 19 01188, 1901188]
[3]   GHz femtosecond processing with agile high-power laser High power and flexible fs lasers in GHz burst mode open new horizons for femtosecond laser processing [J].
Audouard, Eric ;
Bonamis, Guillaume ;
Honninger, Clemens ;
Mottay, Eric .
ADVANCED OPTICAL TECHNOLOGIES, 2021, 10 (4-5) :263-275
[4]   Laser micromachining of steel and copper using femtosecond laser pulses in GHz burst mode [J].
Balachninaite, Ona ;
Tamuliene, Viktorija ;
Eicas, Laurynas ;
Vaicaitis, Virgilijus .
RESULTS IN PHYSICS, 2021, 22
[5]  
Bonamis G, 2018, CONF LASER ELECTR
[6]  
Bonamis G., 2020, CONCEPTION REALISATI
[7]   Systematic study of laser ablation with GHz bursts of femtosecond pulses [J].
Bonamis, Guillaume ;
Audouard, Eric ;
Honninger, Clemens ;
Lopez, John ;
Mishchik, Konstantin ;
Mottay, Eric ;
Manek-Honninger, Inka .
OPTICS EXPRESS, 2020, 28 (19) :27702-27714
[8]   High efficiency femtosecond laser ablation with gigahertz level bursts [J].
Bonamis, Guillaume ;
Mishchick, Konstantin ;
Audouard, Eric ;
Honninger, Clemens ;
Mottay, Eric ;
Lopez, John ;
Manek-Honninger, Inka .
JOURNAL OF LASER APPLICATIONS, 2019, 31 (02)
[9]   Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy [J].
Bonse, J ;
Brzezinka, KW ;
Meixner, AJ .
APPLIED SURFACE SCIENCE, 2004, 221 (1-4) :215-230
[10]   Micromachining of Invar Foils with GHz, MHz and kHz Femtosecond Burst Modes [J].
Butkus, Simas ;
Jukna, Vytautas ;
Paipulas, Domas ;
Barkauskas, Martynas ;
Sirutkaitis, Valdas .
MICROMACHINES, 2020, 11 (08)
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