Transfer-free preparation of flexible strain sensors using high quality VGNs

被引:2
|
作者
He, Yue [1 ]
Luo, Kewen [1 ]
Zhang, Xingfeng [1 ,2 ]
Wu, Tianru [3 ]
Wang, Quan [1 ,4 ]
机构
[1] Jiangsu Univ, Zhenjiang Key Lab Adv Sensing Mat & Devices, Zhenjiang 212013, Peoples R China
[2] Jiangsu Zorrun Semicond Co Ltd, Nantong 226500, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
[4] Chinese Acad Sci, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
关键词
Transfer-free; Vertical graphene nano-walls; Flexible sensor; Plasma-enhanced chemical vapor deposition; Fluorphlogopite mica; PECVD GROWTH; GRAPHENE; COMPOSITES;
D O I
10.1016/j.sna.2023.114949
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Recently, flexible mechanically stimulated sensors have attracted widespread attention in the field of wearable devices and soft robotics. Due to the high stretchability, vertical graphene nano-walls (VGNs) become a competitive candidate to be applied in the flexible strain sensors. Herein, by utilizing the inductively coupled plasma chemical vapor deposition (IC-PECVD) method, a transfer-free VGNs-based flexible strain sensors were successfully prepared on fluorphlogopite mica substrate at 600 celcius. The quality of as-grown VGNs were obviously improved by increasing the ratio of H2 to CH4. The directly prepared VGNs on interdigital electrode could improve the interfacial contact between VGNs and interdigital electrode. The results of bending tests show that flexible sensors which VGNs directly grown on the interdigital electrode have good performance. The combination of sleeves and the sensors reveal that the transfer-free flexible strain sensors could perform well in wearable devices.
引用
收藏
页数:9
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