Structural and optical properties of Zn-implanted silica: effect of fluence and annealing

被引：0

作者：

Makhavikou, M. A. ^{[1
]}

Milchanin, O., V ^{[1
]}

Parkhomenko, I. N. ^{[2
]}

Vlasukova, L. A. ^{[2
]}

Komarov, F. F. ^{[1
]}

Yuvchenko, V. N. ^{[1
]}

Wendler, E. ^{[3
]}

Korolev, D. S. ^{[4
]}

Mudryi, A., V ^{[5
]}

Zhivulko, V. D. ^{[5
]}

van Vuuren, A. Janse ^{[6
]}

机构：

[1] Belarusian State Univ, AN Sevchenko Inst Appl Phys Problems, Minsk 220045, BELARUS

[2] Belarusian State Univ, Minsk 220030, BELARUS

[3] Friedrich Schiller Univ Jena, Inst Solid State Phys, Jena, Germany

[4] Lobachevsky State Univ Nizhny Novgorod, Nizhnii Novgorod 603950, Russia

[5] Natl Acad Sci Belarus, Sci & Pract Mat Res Ctr, Minsk 220072, BELARUS

[6] Nelson Mandela Metropolitan Univ, Ctr High Resolut Transmiss Electron Microscopy, ZA-6001 Port Elizabeth, South Africa

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2023年 / 56卷 / 40期

关键词：

silicon oxide; implantation; zinc oxide; zinc silicate; transmission electron microscopy; electron diffraction; ION-IMPLANTATION; PHOTOLUMINESCENCE; NANOPARTICLES; SIO2; LUMINESCENCE; SIMULATION; CENTERS; BAND;

D O I：

10.1088/1361-6463/acdc37

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The phase-structural composition of silica films grown on Si substrates implanted with different fluences of Zn ions has been studied using transmission electron microscopy (TEM) and electron diffraction. Small clusters (2-3 nm) and larger clusters (5-7 nm) were formed in the as-implanted silica films with Zn concentration of 6-8 at % and 16%-18%, respectively. Furnace annealing at 750 & DEG;C for two hours in air resulted in the formation of an orthorhombic Zn2SiO4 phase (space group R-3) in the case of low fluence (5 x 10(16) cm(-2)) and in the formation of a zinc blended ZnO phase (space group F-43m) in the case of high fluence (1 x 10(17) cm(-2)). Based on the Rutherford backscattering spectrometry (RBS) data, it has been shown that impurity losses during implantation and subsequent annealing increase with the fluence of the implanted ions. The photoluminescence data were consistent with the TEM and RBS.

引用

页数：9

共 50 条

[21] Effect of annealing on the structural and optical properties of (311)B GaAsBi layers
Rodrigo, J. F.
Sales, D. L.
Shafi, M.
Henini, M.
Turyanska, L.
Novikov, S.
Molina, S. I.
APPLIED SURFACE SCIENCE, 2010, 256 (18) : 5688 - 5690
[22] Characterization of nanocluster formation in Cu-implanted silica:: Influence of the annealing atmosphere and the ion fluence
Peña, O
Rodríguez-Fernández, L
Cheang-Wong, JC
Santiago, P
Crespo-Sosa, A
Muñoz, E
Oliver, A
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2006, 352 (04) : 349 - 354
[23] Hydrogenation effects on the structural and optical properties of Si+-implanted fused silica
Choi, Suk-Ho
Kim, Jung Nam
Cho, Hoon Young
CURRENT APPLIED PHYSICS, 2001, 1 (4-5) : 375 - 378
[24] New optical transition, structural, and ferromagnetic properties of InCrP:Zn implanted with Cr
Shon, Yoon
Lee, J. W.
Lee, D. J.
Yoon, I. T.
Kwon, Y. H.
Kim, H. S.
Kang, T. W.
Kyhm, J. H.
Song, J. D.
Koo, H. C.
Fu, D. J.
Park, C. S.
An, H. H.
Yoon, Chong S.
Kim, E. K.
JOURNAL OF LUMINESCENCE, 2014, 154 : 593 - 596
[25] Evolution of structural and optical properties of Ag implanted CrN thin films with annealing temperature
Novakovic, M.
Popovic, M.
Schmidt, E.
Schoeppe, P.
Mitric, M.
Bibic, N.
Ronning, C.
Rakocevic, Z.
JOURNAL OF ALLOYS AND COMPOUNDS, 2017, 729 : 671 - 678
[26] Effect of annealing on the structural properties of arsenic-implanted mercury cadmium telluride
Izhnin, I. I.
Fitsych, O. I.
Swiatek, Z.
Morgiel, Y.
Bonchyk, O. Yu.
Savytskyy, H. V.
Mynbaev, K. D.
Voitsekhovskii, A. V.
Korotaev, A. G.
Yakushev, M. V.
Marin, D. V.
Varavin, V. S.
Dvoretsky, S. A.
OPTO-ELECTRONICS REVIEW, 2019, 27 (01) : 14 - 17
[27] Optical properties of Ir2+-implanted silica glass
Cheang-Wong, JC
Oliver, A
Roiz, J
Hernández, JM
Rodríguez-Fernández, L
Morales, JG
Crespo-Sosa, A
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2001, 175 : 490 - 494
[28] Periodic Mg distribution in GaN:δ-Mg and the effect of annealing on structural and optical properties
Wegscheider, M.
Simbrunner, C.
Li, Tian
Jakiela, R.
Navarro-Quezada, A.
Quast, M.
Sitter, H.
Bonanni, A.
APPLIED SURFACE SCIENCE, 2008, 255 (03) : 731 - 733
[29] Effect of annealing temperature on structural, optical, and photocatalytic properties of titanium dioxide nanoparticles
Muthee, Dorah Kawira
Dejene, Birhanu Francis
HELIYON, 2021, 7 (06)
[30] Structural and optical properties of RF sputtered ZnO thin films: Annealing effect
Sener, Emre
Bayram, Ozkan
Hasar, Ugur Cem
Simsek, Onder
PHYSICA B-CONDENSED MATTER, 2021, 605

← 1 2 3 4 5 →