Reliability Analysis of Thermally Actuated MEMS Micromirror

被引：0

作者：

Maharshi, Vikram ^{[1
]}

Agarwal, Ajay ^{[2
]}

机构：

[1] Indian Inst Technol, Delhi, India

[2] Indian Inst Technol, Jodhpur, Rajasthan, India

来源：

MICRO AND NANOELECTRONICS DEVICES, CIRCUITS AND SYSTEMS | 2023年 / 904卷

关键词：

MEMS; Reliability; Micromirror; Bathtub curve; Fatigue; Actuator; Bimorph;

D O I：

10.1007/978-981-19-2308-1_43

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a reliability analysis of thermally actuated MEMS micromirror devices. The various factors affecting the reliability of the MEMS micromirror device were analyzed and discussed. The reliability distribution function and lifetime of the MEMS micromirror were analyzed. The series and parallel model reliability model for MEMS micromirror were reported. The p-out-of-n redundancy model was considered to increase reliability for the MEMS micromirror device. This model gives more redundancy to it, and the failure of one or more devices does not affect the system performance.

引用

页码：427 / 436

页数：10

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