Precise and Rapid Replication of Complex-Shaped Fused Silica Optics

被引:9
作者
Du, Xiaotong [1 ]
Xu, Ya [1 ]
Liu, Hua [2 ]
Li, Zhoulong [3 ]
Zhu, Li-Min [3 ]
Zhu, Zhiwei [1 ]
机构
[1] Nanjing Univ Sci & Technol, Sch Mech Engn, Nanjing 210094, JS, Peoples R China
[2] Northeast Normal Univ, Minist Educ, Key Lab UV Emitting Mat & Technol, 5268 Renmin St, Changchun 130024, Peoples R China
[3] Shanghai Jiao Tong Univ, Sch Mech Engn, State Key Lab Mech Syst & Vibrat, Shanghai 200240, Peoples R China
基金
中国国家自然科学基金;
关键词
complex-shaped optics; fused silica optics; photocurable silica precursors; rapid replication; GLASS;
D O I
10.1002/adom.202300840
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The high hardness, brittleness, and thermal resistance of fused silica glasses extremely challenge the mass production of complex-shaped fused silica optics. This paper reports a new process chain for rapidly replicating complex-shaped fused silica optics from complex molds at ambient temperature. The process chain mainly consists of the ultraprecision diamond turning of the complex-shaped molds, the rapid shape replication through the silica precursor photopolymerization, and the transparent complex-shaped optics derivation from the debinding and sintering. The directional shrinkages and surface texture evolutions in the process are comprehensively characterized for the replicated fused silica optics. After the shrinkage compensation, transparent fused silica optics with the spherical, microlens array, and hierarchical freeform surfaces are precisely replicated, exhibiting micrometric form accuracy, nanometric surface roughness, and high imaging quality. The proposed process chain provides a revolutionary approach for the mass production of precise complex-shaped fused silica optics with fundamentally improved production efficiency and complex shape formation capability.
引用
收藏
页数:9
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