Simultaneously achieving high performance of thermal stability and power consumption via doping yttrium in Sn15Sb85 thin film

被引:2
作者
Xu, Shengqing [1 ]
Wu, Weihua [1 ,2 ,3 ]
Gu, Han [1 ]
Zhou, Xiaochen [1 ]
Zhu, Xiaoqin [1 ]
Zhai, Jiwei [2 ]
Song, Sannian [4 ]
Song, Zhitang [4 ]
机构
[1] Jiangsu Univ Technol, Sch Math & Phys, Changzhou 213001, Peoples R China
[2] Tongji Univ, Sch Mat Sci & Engn, Shanghai Key Lab R&D & Applicat Met Funct Mat, Shanghai 201804, Peoples R China
[3] Inst Microelect, Chinese Acad Sci, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China
[4] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
基金
中国博士后科学基金;
关键词
phase change materials; thermal stability; power consumption; yttrium doping; CRYSTALLIZATION;
D O I
10.1088/1361-6528/acc80f
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The effects of yttrium dopants on the phase change behavior and microstructure of Sn15Sb85 films have been systematically investigated. The yttrium-doped Sn15Sb85 film has the higher phase transition temperature, ten year data retention ability and crystallization activation energy, which represent a great improvement in thermal stability and data retention. X-ray diffraction, transmission electron microscopy and x-ray photoelectron spectroscopy reveal that the amorphous Sn and Y components restrict the grain growth and decrease the grain size. Raman mode typically associated with Sb is altered when the substance crystallized. Atomic force microscopy results show that the surface morphology of the doped films becomes smoother. T-shaped phase change storage cells based on yttrium-doped Sn15Sb85 films exhibit the lower power consumption. The results demonstrate that the crystallization characteristics of Sn15Sb85 film can be tuned and optimized through the yttrium dopant for the excellent performances of phase change memory.
引用
收藏
页数:8
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共 34 条
[1]   The use of Ga16Sb84 alloy for electronic phase-change memory [J].
Chang, Chih-Chung ;
Chao, Chien-Tu ;
Wu, Jong-Ching ;
Yew, Tr-Rung ;
Tsai, Ming-Jinn ;
Chin, Tsung-Shune .
SCRIPTA MATERIALIA, 2011, 64 (09) :801-804
[2]   Characterizations of electronic and optical properties of Sb-based phase-change material stabilized by alloying Cr [J].
Chen, Chao ;
Lin, Jun ;
Mai, Xianliang ;
Qiao, Chong ;
Tong, Hao ;
Cheng, Xiaomin ;
Wang, Songyou ;
Wang, Cai-Zhuang ;
Ho, Kai-Ming ;
Xu, Ming ;
Miao, Xiangshui .
APPLIED PHYSICS LETTERS, 2021, 118 (04)
[3]   Sb-Te-Se composite film with high-thermal stability for phase-change memory application [J].
Chen, Liangliang ;
Song, Sannian ;
Song, Zhitang ;
Li, Le ;
Zhang, Zhonghua ;
Zheng, Qianqian ;
Zhang, Xin ;
Zhu, Xiuwei ;
Lu, Luyao ;
Shao, Hehong .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2016, 213 (01) :127-132
[4]   Influence of silicon on the thermally-induced crystallization process of Si-Sb4Te phase change materials [J].
Cheng, Yan ;
Song, Zhitang ;
Gu, Yifeng ;
Song, Sannian ;
Rao, Feng ;
Wu, Liangcai ;
Liu, Bo ;
Feng, Songlin .
APPLIED PHYSICS LETTERS, 2011, 99 (26)
[5]   Effects of Y Dopant on Lattice Distortion and Electrical Properties of In3SbTe2 Phase-Change Material [J].
Choi, Minho ;
Choi, Heechae ;
Kwon, Sehyun ;
Kim, Seungchul ;
Lee, Kwang-Ryeol ;
Ahn, Jinho ;
Kim, Yong Tae .
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2017, 11 (11)
[6]   ELECTRONIC-STRUCTURE OF YTTRIUM HYDRIDE STUDIED BY X-RAY PHOTOEMISSION SPECTROSCOPY [J].
FUJIMORI, A ;
SCHLAPBACH, L .
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1984, 17 (02) :341-351
[7]   Ge2Sb2Te5/Sb superlattice-like thin film for high speed phase change memory application [J].
Hu, Yifeng ;
Zou, Hua ;
Zhang, Jianhao ;
Xue, Jianzhong ;
Sui, Yongxing ;
Wu, Weihua ;
Yuan, Li ;
Zhu, Xiaoqin ;
Song, Sannian ;
Song, Zhitang .
APPLIED PHYSICS LETTERS, 2015, 107 (26)
[8]   Superlattice-like Sb50Se50/Ga30Sb70 thin films for high-speed and high density phase change memory application [J].
Hu, Yifeng ;
Feng, Xiaoyi ;
Li, Simian ;
Lai, Tianshu ;
Song, Sannian ;
Song, Zhitang ;
Zhai, Jiwei .
APPLIED PHYSICS LETTERS, 2013, 103 (15)
[9]   Threshold switching mechanism by high-field energy gain in the hopping transport of chalcogenide glasses [J].
Ielmini, Daniele .
PHYSICAL REVIEW B, 2008, 78 (03)
[10]   Unveiling the Effect of Superlattice Interfaces and Intermixing on Phase Change Memory Performance [J].
Khan, Asir Intisar ;
Wu, Xiangjin ;
Perez, Christopher ;
Won, Byoungjun ;
Kim, Kangsik ;
Ramesh, Pranav ;
Kwon, Heungdong ;
Tung, Maryann C. ;
Lee, Zonghoon ;
Oh, Il-Kwon ;
Saraswat, Krishna ;
Asheghi, Mehdi ;
Goodson, Kenneth E. ;
Wong, H. -S. Philip ;
Pop, Eric .
NANO LETTERS, 2022, 22 (15) :6285-6291