Ultrahigh-Q guided mode resonances in an All-dielectric metasurface

被引:137
作者
Huang, Lujun [1 ]
Jin, Rong [2 ,3 ,4 ]
Zhou, Chaobiao [5 ]
Li, Guanhai [2 ,3 ,4 ]
Xu, Lei [6 ]
Overvig, Adam [7 ]
Deng, Fu [1 ]
Chen, Xiaoshuang [2 ,3 ,4 ]
Lu, Wei [2 ,3 ,4 ]
Alu, Andrea [7 ,8 ]
Miroshnichenko, Andrey E. [1 ]
机构
[1] Univ New South Wales, Sch Engn & Informat Technol, Northcott Dr, Canberra, ACT 2600, Australia
[2] Chinese Acad Sci, Shanghai Inst Tech Phys, State Key Lab Infrared Phys, 500 Yu Tian Rd, Shanghai 200083, Peoples R China
[3] Univ Chinese Acad Sci, Hangzhou Inst Adv Study, 1 SubLane Xiangshan, Hangzhou 310024, Peoples R China
[4] Shanghai Res Ctr Quantum Sci, 99 Xiupu Rd, Shanghai 201315, Peoples R China
[5] Guizhou Minzu Univ, Sch Phys & Mechatron Engn, Guiyang 550025, Peoples R China
[6] Nottingham Trent Univ, Sch Sci Technol, Dept Engn, Adv Opt & Photon Lab, Nottingham NG11 8NS, England
[7] CUNY, Adv Sci Res Ctr, Photon Initiat, New York, NY 10031 USA
[8] CUNY, Grad Ctr, Phys Program, New York, NY 10016 USA
基金
中国国家自然科学基金; 澳大利亚研究理事会;
关键词
BOUND-STATES; LIGHT; RESONATORS; VORTEX;
D O I
10.1038/s41467-023-39227-5
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
High quality(Q) factor optical resonators are indispensable for many photonic devices. While very large Q-factors can be obtained theoretically in guided-mode settings, free-space implementations suffer from various limitations on the narrowest linewidth in real experiments. Here, we propose a simple strategy to enable ultrahigh-Q guided-mode resonances by introducing a patterned perturbation layer on top of a multilayer-waveguide system. We demonstrate that the associated Q-factors are inversely proportional to the perturbation squared while the resonant wavelength can be tuned through material or structural parameters. We experimentally demonstrate such high-Q resonances at telecom wavelengths by patterning a low-index layer on top of a 220 nm silicon on insulator substrate. The measurements show Q-factors up to 2.39 x 10(5), comparable to the largest Q-factor obtained by topological engineering, while the resonant wavelength is tuned by varying the lattice constant of the top perturbation layer. Our results hold great promise for exciting applications like sensors and filters. The authors report a simple strategy to enable ultrahigh-Q guided-mode resonances by introducing a patterned perturbation layer on top of a multilayer-waveguide system. Such high-Q resonances are experimentally demonstrated with measured Q-factors up to 2.4 x 10(5).
引用
收藏
页数:9
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