FREE-STANDING MEMBRANES WITH SELF-ASSEMBLED NANOPORE ARRAYS FOR TEM OBSERVATION OF LIQUID SAMPLES

被引：0

作者：

Lim, Joowon ^{[1
]}

Ham, Jimin ^{[1
]}

Jeon, Sungho ^{[1
]}

Bae, Yuna ^{[2
,3
]}

Kang, Minho ^{[2
,3
]}

Lee, Sueng Yoon ^{[1
]}

Park, Jungwon ^{[2
,3
]}

Lee, Won Chul ^{[1
]}

机构：

[1] Hanyang Univ, Dept Mech Engn, BK21 FOUR ERICA ACE Ctr, Ansan, South Korea

[2] Seoul Natl Univ, Sch Chem & Biol Engn, Seoul, South Korea

[3] Inst Basic Sci IBS, Ctr Nanoparticle Res, Seoul, South Korea

来源：

2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年

基金：

新加坡国家研究基金会;

关键词：

AAO mask; reactive ion etching; liquid TEM; nanofabrication; in-situ electron microscopy;

D O I：

10.1109/MEMS49605.2023.10052473

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work presents a method for creating freestanding, uniform nanopore arrays onto two-dimensional (2D) membranes such as silicon using AAO (anodic aluminum oxide) as an etching mask for jointly duplicating identical patterns, with an application of such silicon as holding chambers for in-situ liquid TEM (transmission electron microscopy) observations. By sandwiching the nanopatterned silicon between two sheets of graphene, liquid samples can be trapped and observed in real time. The given methods can provide guidelines in creating freestanding nanopatterned materials as well as applications for in situ liquid cell TEM observations.

引用

页码：651 / 652

页数：2

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