Research on Temperature Compensation of Optical Fiber MEMS Pressure Sensor Based on Conversion Method

被引：3
作者：
Yao, Guozhen [1 ,2 ,3 ]
Li, Yongqian [1 ,2 ,3 ]
Shang, Qiufeng [1 ]
Fan, Hanbai [1 ]
机构：
[1] North China Elect Power Univ, Dept Elect & Commun Engn, Baoding 071003, Peoples R China
[2] North China Elect Power Univ, Hebei Key Lab Power Internet Things Technol, Baoding 071003, Peoples R China
[3] North China Elect Power Univ, Baoding Key Lab Opt Fiber Sensing & Opt Commun Tec, Baoding 071003, Peoples R China
来源：
PHOTONICS | 2023年 / 10卷 / 01期
基金：
中国国家自然科学基金;
关键词：
conversion method; temperature compensation; optical fiber MEMS F-P pressure sensor; sensor calibration; GAS REFRACTIVE-INDEX; CAVITY;
D O I：
10.3390/photonics10010022
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The characteristics of optical fiber MEMS pressure sensors are easily affected by temperature, so effective temperature compensation can improve the accuracy of the sensor. In this paper, the temperature characteristics of optical fiber MEMS pressure sensors are studied, and a temperature compensation method by converting the wavelength is proposed. The influence of target temperature and data point selection on the compensation effect is studied, and the effectiveness of the method is verified by the temperature compensation of sensors before and after aging. When the converted target temperature is 25 degrees C, the pressure measurement accuracy of the sensor is improved from 1.98% F.S. to 0.38% F.S. within the range of 5-45 and 0-4 MPa. The method proposed in this paper can not only improve the accuracy but also make the regular calibration more operable.
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页数：14
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