Effect of temperature on the growth of two-dimensional MoS2 on low-cost soda-lime glass

被引:1
作者
Gao, Qingguo [1 ]
Chen, Simin [1 ]
Huang, Wanying [1 ]
Li, Jiabing [1 ]
Cao, Tianfan [1 ]
Zhang, Zhi [1 ]
Chi, Feng [1 ]
Liu, Ping [1 ]
机构
[1] Univ Elect Sci & Technol China, Zhongshan Inst, Sch Elect Informat, Zhongshan 528402, Peoples R China
关键词
Molybdenum disulfide; BilayerMoS2; Glass; Chemical vapor deposition; Temperature; CHEMICAL-VAPOR-DEPOSITION; MONOLAYER MOS2; PHASE GROWTH; EVOLUTION; TRANSISTORS; CRYSTALS; QUALITY; LAYERS;
D O I
10.1016/j.cap.2023.10.010
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In recent years, the growth of high-quality MoS2 on low-cost glass substrates has attracted extensive attention due to its advantages in terms of low cost, rapid growth rate, and excellent repeatability. In this study, we systematically investigated the effect of temperature on the CVD growth of high-quality MoS2 on low-cost glass substrates. Our experimental results show that increasing the growth temperature from 900 degrees C to 1050 degrees C in the region far from the molybdenum source results in high-quality large-domain MoS2 growth, with the domain size of triangular MoS2 increasing from 109 mu m to 1.27 mm. Furthermore, in the region close to the molybdenum source, we obtained high-quality bilayer MoS2 films with a continuous region larger than 19 mm x 8 mm by increasing the growth temperature from 900 degrees C to 1050 degrees C. These results are significant for the cost-effective and high-quality synthesis of MoS2 and its potential industrial applications.
引用
收藏
页码:1 / 7
页数:7
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