AN INTELLIGENT GAS ANALYSIS SYSTEM CONSISTING OF SENSORS AND A NEURAL NETWORK IMPLEMENTED USING THIN-FILM TRANSISTORS

被引：2
作者：
Liu, Zong [1 ,2 ]
Hu, Yushen [1 ,2 ]
Carranza, Gabriel E. [1 ]
Wang, Fei [2 ]
Wong, Man [1 ]
机构：
[1] Hong Kong Univ Sci & Technol, Hong Kong, Peoples R China
[2] Southern Univ Sci & Technol, Shenzhen, Peoples R China
来源：
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年
关键词：
Gas-sensor; thin-film transistor; indium-gallium-zinc oxide; artificial neural network; monolithic integration;
D O I：
10.1109/MEMS49605.2023.10052572
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Described presently is an "intelligent" gas-analysis system consisting of a gas-sensor array and an artificial neural network (ANN) consisting of dual-gate thin-film transistors (TFTs) for in-system inferencing. The micro-hotplates needed for implementing gas sensors with improved specificity are constructed using a silicon-migration technology for the spontaneous creation of a suspended diaphragm. The TFTs deployed in both the array and the network sub-systems are based on semiconducting indium-gallium-zinc oxide. The two sub-systems are packaged on a printed-circuit board. The ANN infers from the raw sensor signals the identity and the concentration of the gas, thus demonstrating the feasibility of building TFT-based intelligent sensor systems.
引用
收藏
页码：259 / 262
页数：4
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