SINGLE-LAYER-ELECTRODE TEMPERATURE-MODULATED SNO2 GAS SENSOR CELL WITH LOW POWER CONSUMPTION FOR DISCRIMINATION OF FOOD ODORS

This paper presents a SnO2-based six-channel single-layer-electrode temperature-modulated metal oxide (MOX) gas sensor cell with excellent gas discrimination and ultra-low power consumption. The proposed device features horizontally arranged heater and detecting electrodes on the same layer without an isolation layer. As a result, the fabrication steps are largely reduced and the device endurance under high-temperature operation is significantly improved. More importantly, the temperature distribution in the active region of the MOX gas sensor can be effectively tuned by the strategically designed heater width on each sensing channel to achieve high-resolution gas detection. Such gas discrimination ability was further verified by detecting the food-related gases and odors from different food species.