Clustering in gallium ion beam sputtered compound materials driven by bond strength and interstitial/vacancy reaction

被引：3

作者：

Ma, Zhenyu ^{[1
]}

Zhang, Xin ^{[1
]}

Liu, Pu ^{[2
]}

Deng, Yong ^{[1
]}

Hu, Wenyu ^{[3
]}

Chen, Longqing ^{[4
]}

Zhu, Jun ^{[5
]}

Chen, Sen ^{[6
]}

Wang, Zhengshang ^{[7
]}

Shi, Yuechun ^{[8
]}

Ma, Jian ^{[1
]}

Wang, Xiaoyi ^{[1
]}

Qiu, Yang ^{[3
]}

Zhang, Kun ^{[4
]}

Cui, Xudong ^{[9
]}

Walther, Thomas ^{[10
]}

机构：

[1] Southwest Minzu Univ, State Ethn Affairs Commiss, Chengdu 610041, Peoples R China

[2] NCS Testing Technol Co LTD, Chengdu 610041, Peoples R China

[3] Southern Univ Sci & Technol, Pico Ctr, SUSTech Core Res Facil, Shenzhen 518055, Peoples R China

[4] Sichuan Univ, Inst Nucl Sci & Technol, Key Lab Radiat Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China

[5] Sichuan Univ, Coll Phys Sci & Technol, Chengdu 610064, Peoples R China

[6] China Acad Engn Phys, Inst Fluid Phys, Lab Shock Wave & Detonat Phys, Mianyang 621900, Sichuan, Peoples R China

[7] Sichuan Res Ctr New Mat, 596 Yinhe Rd, Chengdu 610200, Peoples R China

[8] Yongjiang Lab, Ningbo 315000, Peoples R China

[9] China Acad Engn Phys, Inst Chem Mat, Mianyang 621900, Peoples R China

[10] Univ Sheffield, Dept Elect & Elect Engn, Mappin St, Sheffield S1 3JD, England

来源：

APPLIED PHYSICS LETTERS | 2023年 / 123卷 / 10期

基金：

中国国家自然科学基金;

关键词：

PHASE-SEPARATION; SURFACE MODIFICATION; IRRADIATION DAMAGE; LOSS SPECTROSCOPY; IMPLANTATION; RECOVERY; DEFECTS; EELS; SI;

D O I：

10.1063/5.0161681

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The investigation of chemical reactions during ion irradiation is a frontier for the study of the ion-material interaction. In order to probe the chemistry of ion produced nanoclusters, valence electron energy loss spectroscopy (VEELS) was exploited to investigate Ga+ ion damage in Al2O3, InP, and InGaAs, where each target material has been shown to react differently to the interaction between impinging ions, recoil atoms, and vacancies: metallic Ga, ternary InGaP clusters, and metallic In clusters are formed in Al2O3, InP, and InGaAs, respectively. Supporting simulations based on Monte Carlo and crystal orbital Hamiltonian calculations indicate that the chemical constitution of cascade induced nano-precipitates is a result of a competition between interstitial/vacancy consumption rates and preferential bond formation due to differing bond strengths.

引用

页数：8

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