Investigation of a minority carrier trap in a NiO/β-Ga2O3 p-n heterojunction via deep-level transient spectroscopy

被引:2
|
作者
Qu, Haolan [1 ,2 ,3 ]
Chen, Jiaxiang [1 ,2 ,3 ]
Zhang, Yu [1 ,2 ,3 ]
Sui, Jin [1 ,2 ,3 ]
Zhang, Ruohan [1 ,4 ]
Zhou, Junmin [1 ,2 ,3 ]
Lu, Xing [5 ]
Zou, Xinbo [1 ,4 ]
机构
[1] ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai 201210, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
[3] Univ Chinese Acad Sci, Sch Microelect, Beifing 100029, Peoples R China
[4] Shanghai Engn Res Ctr Energy Efficient & Custom AI, Shanghai 200031, Peoples R China
[5] Sun Yat Sen Univ, Sch Elect & Informat Technol, Guangzhou 510275, Peoples R China
基金
上海市自然科学基金; 中国国家自然科学基金;
关键词
NiO/beta-Ga2O3 p-n heterojunction; deep-level transient spectroscopy; minority carrier trap; time constant; trap concentration; GAN;
D O I
10.1088/1361-6641/acf608
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The properties of a minority carrier (hole) trap in ss-Ga2O3 have been explicitly investigated using a NiO/ss-Ga2O3 p-n heterojunction. Via deep-level transient spectroscopy, the activation energy for emission (E-emi) and the hole capture cross section (sigma(p)) were derived to be 0.10 eV and 2.48 x 10(-15) cm(2), respectively. Temperature-enhanced capture and emission kinetics were revealed by the decrease in the capture time constant (Tau(c)) and emission time constant (Tau(e)). Moreover, it was determined that the emission process of the minority carrier trap is independent of the electric field. Taking carrier recombination into account, a corrected trap concentration (N-Ta) of 2.73 x 10(15) cm(-3) was extracted, together with an electron capture cross section (sigma(n)) of 1.42 x 10(-18) cm(2). This study provides a foundation for the comprehension of trap properties in ss-Ga2O3, which is crucial for overcoming self-trapped hole effects when obtaining p-type ss-Ga2O3 materials and performance enhancement of ss-Ga2O3-based power devices.
引用
收藏
页数:7
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