High-Q Silicon Nitride Few-Mode Microdisk Resonators

被引：2

作者：

Chen, Yuan ^{[1
]}

Fan, Zhiqiang ^{[1
]}

Yang, Yang ^{[1
]}

Lin, Yue ^{[1
]}

Jiang, Di ^{[1
]}

Li, Xiang ^{[1
]}

Qiu, Qi ^{[1
]}

机构：

[1] Univ Elect Sci & Technol China UESTC, Sch Optoelect Sci & Engn, Chengdu 611731, Peoples R China

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2024年 / 36卷 / 03期

基金：

中国国家自然科学基金;

关键词：

Whispering gallery mode; microdisk resonator; asymmetric directional coupler; mode suppression;

D O I：

10.1109/LPT.2023.3344875

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

High-Q silicon nitride microdisk resonators (MDRs) with fewer resonant modes are proposed and experimentally demonstrated. The proposed MDRs consist of microdisks and optimized bent bus waveguides. The introduction of asymmetric directional couplers (DCs) successfully destroys part of high-order modes resonance and enhances that of TE1 and TE2 radial modes so that the spectral purity of the MDRs is improved. In this way, guided-modes propagate in MDRs with low loss and > 10(6) Q-factors are obtained. The maximum measured loaded Q-factor and intrinsic Q-factor is 4.7 x 10(6 )and 5.9 x 10(6), respectively. The minimum wavelength interval between two notches is 0.68 nm. The proposed few-mode MDRs are realized with one step silicon nitride etching process provided by a multiproject wafer foundry and they have broad application prospects in integrated microwave photonic systems, sensing, and other fields.

引用

页码：179 / 182

页数：4

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