Using Gate Leakage Conduction to Understand Positive Gate Bias Induced Threshold Voltage Shift in p-GaN Gate HEMTs

被引:25
作者
Tang, Shun-Wei [1 ]
Bakeroot, Benoit [2 ,3 ]
Huang, Zhen-Hong [1 ]
Chen, Szu-Chia [1 ]
Lin, Wei-Syuan [1 ]
Lo, Ting-Chun [1 ]
Borga, Matteo [4 ]
Wellekens, Dirk [4 ]
Posthuma, Niels [4 ]
Decoutere, Stefaan [4 ]
Wu, Tian-Li [1 ]
机构
[1] Natl Yang Ming Chiao Tung Univ, Int Coll Semicond Technol, Hsinchu 30010, Taiwan
[2] Imec, Ctr Microsyst Technol CMST, B-9052 Ghent, Belgium
[3] Univ Ghent, B-9052 Ghent, Belgium
[4] Imec, B-3001 Leuven, Belgium
关键词
GaN high electron mobility transistors (HEMTs); p-GaN gate; PBTI; V(TH )instability; V-TH;
D O I
10.1109/TED.2022.3231566
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, the gate current characteristics are investigated to explain the threshold voltage shift in AlGaN/GaN high electron mobility transistors (HEMTs) with a p-GaN gate. First, the intrinsic gate current conduction mechanisms are identified: in the low bias range (2.5 V < V-G < 4 V), thermionic emission (TE) dominates in the AlGaN/GaN region, whereas in a higher bias range (4 V < V-G < 7 V) trap-assisted tunneling (TAT) is occurring in the Schottky/p-GaN region. Secondly, the threshold voltage shift of the stress phase is evaluated by applying a positive gate bias for various stress times. A consistent trap level with an activation energy of E-A similar to 0.6 eV is found. In conclusion, a physical model explaining the negative V-TH shift by considering TAT via hole transport is proposed.
引用
收藏
页码:449 / 453
页数:5
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