SILICON SURFACE PATTERNING BY GLOW DISCHARGE PLASMA

被引：2

作者：

Petrova, A. V. ^{[1
,2
]}

Bogoslovtseva, A. L. ^{[1
,2
]}

Starinskiy, S. V. ^{[1
,2
]}

Safonov, A. I. ^{[1
]}

机构：

[1] Russian Acad Sci, Kutateladze Inst Thermophys, Siberian Branch, Novosibirsk, Russia

[2] Novosibirsk State Univ, Novosibirsk, Russia

来源：

JOURNAL OF APPLIED MECHANICS AND TECHNICAL PHYSICS | 2023年 / 64卷 / 03期

关键词：

glow discharge; silicon processing; oxidation; wettability; hydrophilicity; WETTABILITY; COATINGS;

D O I：

10.1134/S0021894423030136

中图分类号：

O3 [力学];

学科分类号：

08 ; 0801 ;

摘要：

The possibility of changing the silicon surface morphology at certain glow discharge parameters is shown. It is established that oxidation is the main process influencing the surface morphology during glow discharge plasma treatment. As a result of processing in the investigated parameter range, various stages of the surface oxidation process are observed: the formation of a uniform oxide layer and the formation of nano- and microstructures of silicon oxide. It is shown that these processes lead to surface modification, which acquires stable hydrophilic and superhydrophilic properties.

引用

页码：472 / 477

页数：6

共 15 条

[1] Boinovich LB, 2008, USP KHIM+, V77, P619
[2] Burger R. M., 1967, FUNDAMENTALS SILICON
[3] Wettability of porous surfaces.
Cassie, ABD
Baxter, S
[J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1944, 40 : 0546 - 0550
[4] EFFECT OF THE INTENSITY OF MECHANICAL PROCESSING OF BRONZE PARTICLES ON THE CHARACTERISTICS OF COATINGS FORMED BY THE METHOD OF COLD SPRAYING
Chesnokov, A. E.
Klinkov, S., V
Kosarev, V. F.
Smirnov, A., V
Shikalov, V. S.
[J]. JOURNAL OF APPLIED MECHANICS AND TECHNICAL PHYSICS, 2022, 63 (01) : 47 - 53
[5] EFFECT OF LASER IMPACT PARAMETERS ON THE FORMATION OF A POOL OF THE MOLTEN B4C - Ti-6Al-4V CERMET MIXTURE
Golyshev, A. A.
Orishich, A. M.
[J]. JOURNAL OF APPLIED MECHANICS AND TECHNICAL PHYSICS, 2022, 63 (02) : 268 - 278
[6] A study on the etching characteristics of atmospheric pressure plasma for single-crystal silicon wafer
Guo, Weijia
Calija, Laurence Michael M.
Xu, Peng
Liu, Kui
Kumar, Senthil A.
[J]. VACUUM, 2021, 190
[7] Krapivina S.A., 1981, Plasma-Chemical Technological Processes
[8] Superhydrophilicity to superhydrophobicity transition of picosecond laser microstructured aluminum in ambient air
Long, Jiangyou
Zhong, Minlin
Zhang, Hongjun
Fan, Peixun
[J]. JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2015, 441 : 1 - 9
[9] Contact angles and wettability: towards common and accurate terminology
Marmur, Abraham
Della Volpe, Claudio
Siboni, Stefano
Amirfazli, Alidad
Drelich, Jaroslaw W.
[J]. SURFACE INNOVATIONS, 2017, 5 (01) : 3 - 8
[10] Laser texturing of silicon surface to enhance nucleate pool boiling heat transfer
Serdyukov, Vladimir
Starinskiy, Sergey
Malakhov, Ivan
Safonov, Alexey
Surtaev, Anton
[J]. APPLIED THERMAL ENGINEERING, 2021, 194

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