High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance

被引：6

作者：

D'Agati, Michael J. ^{[1
]}

Sofronici, Sydney ^{[1
]}

Huo, Yujia ^{[1
]}

Finkel, Peter ^{[2
]}

Bussmann, Konrad ^{[2
]}

McLaughlin, Keith L. ^{[3
]}

Wheeler, Brad ^{[3
]}

Jones, Nicholas J. ^{[4
]}

Mion, Thomas ^{[2
]}

Staruch, Margo ^{[2
]}

Olsson III, Roy H. H. ^{[1
]}

机构：

[1] Univ Penn, Elect Engn Dept, Philadelphia, PA 19104 USA

[2] US Naval Res Lab, Mat Sci & Technol Div, Washington, DC 20375 USA

[3] Leidos Inc, Leidos Innovations Ctr LInC, Arlington, VA 22203 USA

[4] Naval Surface Warfare Ctr, Carderock Div, Bethesda, MD 20817 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2023年 / 32卷 / 01期

基金：

美国国家科学基金会;

关键词：

Aluminum nitride; iron cobalt; magnetic sens-ing; magnetometer; MEMS; multiferroics; strain modulation; MAGNETOMETER; MICROSTRUCTURE;

D O I：

10.1109/JMEMS.2022.3226150

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Magnetic fields produced by the body can provide information for medical diagnoses, patient monitoring, and robotic control. Measuring biomagnetic signals locally allows for an external sensing mechanism that is non-invasive and non-contact. Despite these advantages, current sensing systems are either prohibitively large, consume excessive power, or both when applied to on-body applications. This study explores how multiferroic systems can provide an alternative to current biomagnetic sensing platforms. While maintaining a very small die size (2.25mm (2)) and low power consumption (13mW), multiferroic resonant MEMS magnetometers can provide high sensitivity and low noise at room temperature. Two resonant plate designs operating in the MHz regime are explored, implementing a strain modulation technique to upconvert low frequency magnetic field signals to the resonance band of the plates, utilizing the high device Q factors. When operated below the Duffing limit, sensitivities of 58.4mA/T and 37.7mA/T with resolutions of 5.03nT/ root Hz and 2.72nT/ root Hz, respectively, were observed for the two devices. Without electric modulation, the large sensor design shows a sensitivity of 1.56A/T and a resolution of 2pT/root Hz when sensing an AC magnetic field at the device resonance. 2022-0158

引用

页码：91 / 102

页数：12

共 50 条

[1]

[Anonymous], 2019, 450 MHZ PROGR GAIN D

[2] The THEMIS Fluxgate Magnetometer [J].

Auster, H. U. ;

Glassmeier, K. H. ;

Magnes, W. ;

Aydogar, O. ;

Baumjohann, W. ;

Constantinescu, D. ;

Fischer, D. ;

Fornacon, K. H. ;

Georgescu, E. ;

Harvey, P. ;

Hillenmaier, O. ;

Kroth, R. ;

Ludlam, M. ;

Narita, Y. ;

Nakamura, R. ;

Okrafka, K. ;

Plaschke, F. ;

Richter, I. ;

Schwarzl, H. ;

Stoll, B. ;

Valavanoglou, A. ;

Wiedemann, M. .

SPACE SCIENCE REVIEWS, 2008, 141 (1-4) :235-264

[3] Low frequency picotesla field detection using hybrid MgO based tunnel sensors [J].

Chaves, R. C. ;

Freitas, P. P. ;

Ocker, B. ;

Maass, W. .

APPLIED PHYSICS LETTERS, 2007, 91 (10)

[4] Quasi-one-dimensional miniature multiferroic magnetic field sensor with high sensitivity at zero bias field [J].

Chen, Yajie ;

Gillette, Scott M. ;

Fitchorov, Trifon ;

Jiang, Liping ;

Hao, Hongbo ;

Li, Jiheng ;

Gao, Xuexu ;

Geiler, Anton ;

Vittoria, C. ;

Harris, V. G. .

APPLIED PHYSICS LETTERS, 2011, 99 (04)

[5] MAGNETOMYOGRAPHY - MAGNETIC FIELDS AROUND HUMAN BODY PRODUCED BY SKELETAL MUSCLES [J].

COHEN, D ;

GIVLER, E .

APPLIED PHYSICS LETTERS, 1972, 21 (03) :114-+

[6] Improvements on the design of search coil magnetometer for space experiments [J].

Coillot, C. ;

Moutoussamy, J. ;

Leroy, P. ;

Chanteur, G. ;

Roux, A. .

SENSOR LETTERS, 2007, 5 (01) :167-170

[7] Ultrahigh sensitivity magnetic field and magnetization measurements with an atomic magnetometer [J].

Dang, H. B. ;

Maloof, A. C. ;

Romalis, M. V. .

APPLIED PHYSICS LETTERS, 2010, 97 (15)

[8] Characterization of magnetomechanical properties in FeGaB thin films [J].

Dong, Cunzheng ;

Li, Menghui ;

Liang, Xianfeng ;

Chen, Huaihao ;

Zhou, Haomiao ;

Wang, Xinjun ;

Gao, Yuan ;

McConney, Michael E. ;

Jones, John G. ;

Brown, Gail J. ;

Howe, Brandon M. ;

Sun, Nian X. .

APPLIED PHYSICS LETTERS, 2018, 113 (26)

[9] Extremely low frequency response of magnetoelectric multilayer composites [J].

Dong, SX ;

Zhai, JY ;

Xing, ZP ;

Li, JF ;

Viehland, D .

APPLIED PHYSICS LETTERS, 2005, 86 (10) :1-3

[10] Magnetic fields from skeletal muscles: a valuable physiological measurement? [J].

Garcia, Marco A. C. ;

Baffa, Oswaldo .

FRONTIERS IN PHYSIOLOGY, 2015, 6

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