Picosecond laser-induced evolution of processing properties of 4H-SiC

The irradiation threshold of 4H-SiC under picosecond laser action was calculated, and the influence of laser parameters on the size of 4H-SiC was studied. According to the model, the evolution rule of the microgroove size was predicted. The effect of laser parameters on the mechanical properties of 4H-SiC was studied by nanoindentation. The results show that the ablation threshold energy density of the picosecond laser on 4H-SiC is 2.67 J/cm(2). The effect regular of laser parameters on the size of 4H-SiC microgrooves: energy density > scanning speed > scanning interval. The error of the microgroove which is between the predicted value and measurements is within 10 %. By doing nanoindentation detection, proving that Pop-in is the elastic-plastic transition point. It shows that laser irradiation has a significant modification effect on the mechanical properties of 4H-SiC. According to the difference range of elastic modulus and hardness, showing that the influence of laser energy density on mechanical properties is dominant. The consequences of the study provide a theoretical foundation for subsequent CMP processing.