共 50 条
Highly sensitive sensor of NH3 and ethanol vapours based on NiO/MPS heterojunction at room temperature
被引:2
作者:
M'hammedi, K.
[1
]
Berouaken, M.
[2
]
Gabouze, N.
[2
]
机构:
[1] Univ Blida 1, Fac Sci, Dept Phys, Lab Surfaces Interfaces & Couches Minces, Blida 09000, Algeria
[2] Ctr Rech Technol Semicond Energet CRTSE, Algiers 16038, Algeria
关键词:
Sensors;
ethanol;
NH3;
NiO;
MPS heterojunction;
room temperature;
NIO THIN-FILM;
SENSING PROPERTIES;
GAS;
NANOPARTICLES;
PERFORMANCE;
EXTRACTION;
IMPEDANCE;
D O I:
10.1007/s12034-023-02959-7
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
This article reports the low-cost fabrication of p-NiO/n-MPS heterostructure and its application for NH3 and C2H5OH sensing. Macroporous silicon (MPS) was synthesized by electrochemical anodization on an n-type Si surface, followed by the deposition of NiO by sol-gel dip-coating method. Aluminium electrical contacts for further measurements were deposited onto the structure NiO/MPS by evaporation technique under vacuum. Furthermore, the gas sensing performance for the detection of C2H5OH and NH3 at room temperature was investigated. The results indicated a high response of the sensor to NH3 and C2H5OH, the maximum response was found of 880 and 140%, respectively, for a concentration of 137 ppm. The investigation on response kinetics showed a fast response/recovery time of the sensor.
引用
收藏
页数:9
相关论文
共 50 条