Highly sensitive sensor of NH3 and ethanol vapours based on NiO/MPS heterojunction at room temperature

被引：2

作者：

M'hammedi, K. ^{[1
]}

Berouaken, M. ^{[2
]}

Gabouze, N. ^{[2
]}

机构：

[1] Univ Blida 1, Fac Sci, Dept Phys, Lab Surfaces Interfaces & Couches Minces, Blida 09000, Algeria

[2] Ctr Rech Technol Semicond Energet CRTSE, Algiers 16038, Algeria

来源：

BULLETIN OF MATERIALS SCIENCE | 2023年 / 46卷 / 03期

关键词：

Sensors; ethanol; NH3; NiO; MPS heterojunction; room temperature; NIO THIN-FILM; SENSING PROPERTIES; GAS; NANOPARTICLES; PERFORMANCE; EXTRACTION; IMPEDANCE;

D O I：

10.1007/s12034-023-02959-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This article reports the low-cost fabrication of p-NiO/n-MPS heterostructure and its application for NH3 and C2H5OH sensing. Macroporous silicon (MPS) was synthesized by electrochemical anodization on an n-type Si surface, followed by the deposition of NiO by sol-gel dip-coating method. Aluminium electrical contacts for further measurements were deposited onto the structure NiO/MPS by evaporation technique under vacuum. Furthermore, the gas sensing performance for the detection of C2H5OH and NH3 at room temperature was investigated. The results indicated a high response of the sensor to NH3 and C2H5OH, the maximum response was found of 880 and 140%, respectively, for a concentration of 137 ppm. The investigation on response kinetics showed a fast response/recovery time of the sensor.

引用

页数：9

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