Resistive switching behavior in ZnO:Ca thin films deposited by a pulsed laser deposition technique

Calcium-doped ZnO (CZO) nanopowders were synthesized using the sol-gel method. The structural characteristics were investigated by X-ray diffraction (XRD) and the analysis reveals that our samples are crystalized in a wurtzite hexagonal structure. The morphological properties and the chemical composition of the nanoparticles were studied by transmission electron microscopy (TEM), scanning electron microscopy (SEM), and energy-dispersive X-ray spectroscopy (EDX). The obtained powders are stoichiometric with crystallites in a nanometric scale aggregated in micrometric particles. Then, pulsed laser deposition (PLD) technique was used to grow Ca-doped ZnO thin films with different doping concentrations (1, 3, and 5%), on p-type Si substrates. The Ca doping effect on the electrical properties of the CZO films was investigated by current-voltage characteristics. A resistive switching (RS) effect was observed in the ITO/ZnO:Ca/Au structures. The RS behavior is dependent on the Ca doping concentration. The charge transport mechanisms of the devices were studied. In the positive bias voltage region, the transport is dominated by Ohmic and space-charge limited conduction mechanisms under low and high electric fields, respectively.