Effects of power and temperature on the structural, anti-icing, wettability, and optical properties of zinc oxide thin films

被引:7
作者
Patel, Nicky P. [1 ]
Chauhan, Kamlesh V. [1 ]
Desai, Mayur K. [1 ]
机构
[1] Charotar Univ Sci & Technol CHARUSAT, Chandubhai S Patel Inst Technol CSPIT, CHAMOS Matrusanstha Dept Mech Engn, Changa 388421, Gujarat, India
关键词
Anti-icing; Optical; Sputtering; Thin films; Wettability; Zinc oxide; SUBSTRATE-TEMPERATURE; DOPED ZNO; ICE ACCRETION; TRANSPARENT; DEPOSITION;
D O I
10.1016/j.ceramint.2023.05.233
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Zinc oxide semiconductors have received significant research attention over the past decade owing to their diverse applications. In this paper, we report the development and characterisation of ZnO thin films prepared by radio-frequency (RF) magnetron sputtering. The optical, anti-icing, wettability, and structural properties of the films were investigated at various sputtering power levels and temperatures. With an increase in the power from 175 to 250 W, the ZnO thin films showed fine (002) structures. X-ray diffraction analysis of the coated thin films revealed a considerable increase in the (002) peak intensity along the c-axis with increasing power and tem-perature. Increasing the sputtering power from 175 to 250 W and the deposition temperature from 150 to 300 degrees C led to an increase in the average size of the grains from 10.548 to 13.151 nm and from 9.97 to 13.151 nm, respectively. The water contact angle possibly depends on the RF power and temperature employed for material deposition. Within the 350-800 nm range, the prepared films achieved optical transmissions of 92%-88%, refractive indices of 1.52-1.50, and band gaps of 3.28-3.24 eV. The anti-icing properties were also improved by adjusting the sputtering power and temperature during material deposition.
引用
收藏
页码:26943 / 26949
页数:7
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