Optical and structural investigations of annealing impact on phase separation of Erbium-doped Al2O3 layers

被引:3
作者
Al Helou, N. [1 ]
Khomenkova, L. [2 ,3 ,4 ]
Cadel, E. [1 ]
Labbe, C. [2 ]
Cardin, J. [2 ]
Gourbilleau, F. [2 ]
Talbot, E. [1 ]
机构
[1] Normandie Univ, UNIROUEN, INSA Rouen, CNRS,Grp Phys Mat, F-76000 Rouen, France
[2] Normandie Univ, CIMAP, CNRS, CNRS,ENSICAEN,UNICAEN,CEA, F-14050 Caen, France
[3] Natl Acad Sci Ukraine, V Lashkaryov Inst Semicond Phys, 45 Prospekt Nauky, UA-03028 Kiev, Ukraine
[4] Natl Univ Kyiv Mohyla Acad, 2 Skovorody Str, UA-04070 Kiev, Ukraine
来源
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS | 2023年 / 296卷
关键词
Aluminum oxides; Cathodoluminescence; Phase transition; Structural properties; Rare-earth; UP-CONVERSION; ER3+; IONS;
D O I
10.1016/j.mseb.2023.116672
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report on the effect of annealing treatment on the structural and optical properties of Er-doped Al2O3 thin films elaborated by atomic layer deposition. The properties of the films were studied using ellipsometry and Fourier-transform infrared (FTIR) spectroscopies, cathodoluminescence (CL) versus annealing temperature varied in the 650-1100 degrees C range. Spatial location and diffusion of chemical species were investigated at the atomic scale by atom probe tomography (APT). The CL measurements evidence Er3+ light emission over the visible-infrared spectral range. The CL spectra evolution showed non-monotonic variation with annealing temperature and a CL quenching occurring at 1000 degrees C. The CL signal evolution as a function of the annealing treatment is discussed regarding to the evolution of structural properties.
引用
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页数:8
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