Design and Analysis of a MOEMS Gyroscope Based on a Ring-Shaped Hybrid Structure

This paper presents a double-sided gyroscope that uses a novel vibrating MOEMS structure via a hybrid plasmonic readout circuit. The proposed mechanism is based on the Coriolis effect and surface plasmon polaritons in which the sensing piece consists of a laser, a ring-shaped gold layer, and a photo-detector. According to the simulations, the proposed device provides a measurement range of +/- 630 degrees/s, a mechanical displacement sensitivity of 2.2 nm/(degrees/s), a mechanical tilt sensitivity of 0.0025 degrees/(degrees /s), an optical sensitivity of 225.15 mu W/(degrees/s), a total sensitivity of 90.06 mu A/(degrees/s), an ultra-low resolution of 0.444 mu degrees /s, and an accuracy of 99.99%. The proof mass is 0.43505 mu g, the operational wavelength is lambda = 630 nm, and the bandwidth is 1.2 kHz with a drive frequency of 1 kHz. Moreover, a comprehensive study on the effects of various mechanical and optical parameters on the functions of the designed gyroscope is proposed.