A Novel Measurement Method for Determining Geometric Errors of Rotary Tables by Using LaserTRACER and Reflectors

被引:8
作者
Hsu, Chi-Hua [1 ]
Chen, Jr-Rung [1 ]
Hsu, Fan-Hsi [2 ]
Chen, Yu-Ta [3 ]
机构
[1] Ind Technol Res Inst, Ctr Measurement Stand, Hsinchu 30011, Taiwan
[2] Ming Hsin Univ Sci & Technol, Dept Semicond & Electroopt Technol, Hsinchu 30401, Taiwan
[3] Natl Formosa Univ, Dept Mech Design Engn, Yunlin 632301, Taiwan
来源
APPLIED SCIENCES-BASEL | 2023年 / 13卷 / 04期
关键词
rotary table; geometric errors; multilateration method; auto-tracking laser interferometer; 5-AXIS MACHINE-TOOLS; TOUCH-TRIGGER PROBE; LOCATION ERRORS; AXES; IDENTIFICATION; AXIS; OPTIMIZATION; COMPENSATION; COORDINATE;
D O I
10.3390/app13042419
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In this paper, a novel and robust measurement method is proposed for obtaining the geometric errors of rotary tables by using LaserTRACER and the reflectors mounted on the reflector standard fixture. For the machining accuracy, the six-degree-of-freedom (6-DOF) geometric errors of the rotary axes interactively influence the manufacturing quality of the precise workpieces. Therefore, this paper mainly aims to develop a measurement method for identifying the 6-DOF geometric errors of rotary tables without using the external linear axis. Furthermore, the set-up errors of the reflector standard fixture are also considered and identified to reduce the influence of the 6-DOF geometric error measurements. For each rotary table geometric error measurement, the positions of the LaserTRACER as well as the relative distance between the reflectors and the LaserTRACER are measured and obtained for determining the 6-DOF geometric errors of the rotary tables. In addition, the homogeneous transformation matrix (HTM), multilateration method, and least squares method are used for building the mathematical measurement algorithm. Moreover, the experimental verifications are implemented to demonstrate the accuracy of the proposed measurement method. Conclusively, the experiment and simulation verification results clearly delineate that the maximal relative differences in the linear errors and the angular errors of the 6-DOF geometric errors are, at most, 3.25% and 2.30%, respectively.
引用
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页数:14
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