On the Formation and Investigation of Multilayer Films of a High-Entropy Alloy Obtained by the Ion-Plasma Method in a Nitrogen Environment

被引：0

作者：

Ahmadeev, Yu. H. ^{[1
]}

Ivanov, Yu. F. ^{[1
]}

Koval, N. N. ^{[1
]}

Shugurov, V. V. ^{[1
]}

Petrikova, E. A. ^{[1
]}

Krysina, O. V. ^{[1
]}

Prokopenko, N. A. ^{[1
]}

Azhazha, I. I. ^{[1
]}

Shmakov, A. N. ^{[2
,3
]}

机构：

[1] Russian Acad Sci, Siberian Branch, Inst High Current Elect, Tomsk 634055, Russia

[2] Russian Acad Sci, Budker Inst Nucl Phys, Siberian Branch, Novosibirsk 630090, Russia

[3] Russian Acad Sci, Boreskov Inst Catalysis, Fed Res Ctr SKIF, Siberian Branch, Novosibirsk 630090, Russia

来源：

JOURNAL OF SURFACE INVESTIGATION | 2023年 / 17卷 / 06期

关键词：

high-entropy alloys; cermet films; vacuum-arc plasma-assisted method; sputtering; phase composition; structure; microhardness; wear resistance; MECHANICAL-PROPERTIES; NITRIDE COATINGS; MICROSTRUCTURE; STABILITY;

D O I：

10.1134/S1027451023060034

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

A developed vacuum-arc plasma-assisted method is applied to produce films of a high-entropy alloy from a multicomponent gas-metal plasma generated by the simultaneous independent evaporation of selected metal cathodes. New modes are revealed to allow the deposition of thin films of a high-entropy alloy, AlTiCrNbMo-N, with a nearly equiatom composition. The films are a multilayer nanocrystalline material with a body-centered cubic lattice, the parameter of which specifically depends on the concentration of elements in the alloy. The synchrotron-radiation technique demonstrates that films of the high-entropy alloy AlTiCrNbMo-N are stable when heated in air to temperatures not exceeding 620 degrees C.

引用

页码：1287 / 1294

页数：8

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