Differential characteristics of the particles sputtered by gas cluster ions at elevated temperatures. Molecular dynamics simulation

被引：0

作者：

Ieshkin, A. E. ^{[1
]}

Nazarov, A. V. ^{[2
]}

Bessmertniy, D. R. ^{[1
]}

Kutlusurin, I. N. ^{[1
]}

Shemukhin, A. A. ^{[2
]}

机构：

[1] Lomonosov Moscow State Univ, Phys Fac, Moscow 119991, Russia

[2] Lomonosov Moscow State Univ, Skobeltsyn Inst Nucl Phys, Moscow 119991, Russia

来源：

VACUUM | 2024年 / 222卷

基金：

俄罗斯科学基金会;

关键词：

Cluster ions; Sputtering; Thermal spike; Molecular dynamics; Temperature effects; METALS; BOMBARDMENT; SPIKES; MODEL;

D O I：

10.1016/j.vacuum.2024.113064

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effect of the target temperature on sputtering by gas cluster ions was investigated using molecular dynamics simulation. The temperature of <111> copper target was set in range from 300 K to 1100 K, and bombarding 10 keV argon clusters had the size from 50 to 500 atoms. Sputter yield was found to increase with the temperature. The increase depended on the cluster size, and its value was much higher than it had been considered previously for nonlinear sputtering. Differential characteristics of the process, such as angular, energy, and time distributions of the sputtered atoms, as well as their initial positions, were obtained to promote understanding of the mechanisms involved. The dynamics of the collision crater size and its shape were described. The concept of temperature inside the collision area was used to explain the results.

引用

页数：7

共 44 条

[1] Molecular dynamics simulation study of damage formation and sputtering with huge fluorine cluster impact on silicon [J].

Aoki, Takaaki ;

Seki, Toshio ;

Matsuo, Jiro .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2013, 303 :170-173

[2]

Behrisch R., 1981, TOPICS APPL PHYS, DOI DOI 10.1007/3-540-10521-2

[3] Model for the Emission of Quasi-Thermal Atoms during Sputtering of Metals in the Nonlinear Collision Cascade Regime [J].

Belykh, S. F. ;

Tolstoguzov, A. B. ;

Lozovan, A. A. ;

Aleshin, M. E. ;

Elant'ev, I. A. .

JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS, 2014, 118 (04) :560-568

[4] Au sputtering by cluster bombardment: A molecular dynamics study [J].

Colla, TJ ;

Urbassek, HM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 164 :687-696

[5] Ion yield enhancement at the organic/inorganic interface in SIMS analysis using Ar-GCIB [J].

Cristaudo, V ;

Poleunis, C. ;

Laha, P. ;

Eloy, P. ;

Hauffman, T. ;

Terryn, H. ;

Delcorte, A. .

APPLIED SURFACE SCIENCE, 2021, 536

[6] A perspective on nanoscale pattern formation at surfaces by ion-beam irradiation [J].

Cuerno, R. ;

Kim, J. -S. .

JOURNAL OF APPLIED PHYSICS, 2020, 128 (18)

[7]

Elich J. J. PH., 1971, Radiation Effects, V10, P175, DOI 10.1080/00337577108230424

[8] Temperature-Dependent Sputtering with Gas Cluster Ions: Numerical Simulation [J].

Ieshkin, A. E. ;

Zavilgelsky, A. D. ;

Beliaev, M. E. ;

Nazarov, A., V .

MOSCOW UNIVERSITY PHYSICS BULLETIN, 2022, 77 (04) :627-631

[9] Energy Distributions of Secondary Charged Particles Sputtered by Gas Cluster Ions [J].

Ieshkin, A. E. ;

Tatarintsev, A. A. ;

Kireev, D. S. ;

Bachurin, V., I ;

Rudyi, A. S. .

TECHNICAL PHYSICS LETTERS, 2021, 47 (05) :381-384

[10] Energy distributions of the particles sputtered by gas cluster ions. Experiment and computer simulation [J].

Ieshkin, A. E. ;

Nazarov, A., V ;

Tatarintsev, A. A. ;

Kireev, D. S. ;

Zavilgelsky, A. D. ;

Shemukhin, A. A. ;

Chernysh, V. S. .

SURFACE & COATINGS TECHNOLOGY, 2020, 404

← 1 2 3 4 5 →