STRUCTURING OF COPPER SURFACE BY GLOW DISCHARGE PLASMA

被引：0
|
作者：
Petrova, A. V. [1 ]
Safonov, A. I. [1 ]
机构：
[1] Russian Acad Sci, Kutateladze Inst Thermophys, Siberian Branch, Novosibirsk, Russia
来源：
JOURNAL OF APPLIED MECHANICS AND TECHNICAL PHYSICS | 2023年 / 64卷 / 05期
关键词：
glow discharge; surface treatment; copper sample; oxidation; microstructures; nanostructures; roughness; HEAT-TRANSFER; FABRICATION;
D O I：
10.1134/S002189442305005X
中图分类号：
O3 [力学];
学科分类号：
08 ; 0801 ;
摘要：
This study demonstrates that the surface roughness of a copper sample can be controlled by treating it with glow discharge plasma. It is established that the main process affecting the morphology and composition of the surface is oxidation. Treatment causes the formation of various copper oxide nano- and microstructures on the surface of a copper sample. It is shown that, in the parameter range studied, the working gas pressure has a more significant effect on the formation of various structures than the glow discharge current density. As a result of the treatment, various stages of the surface oxidation are observed, caused by differences in the surface temperature.
引用
收藏
页码：772 / 777
页数：6
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