Novel GaN-based double-channel p-heterostructure field-effect transistors with a p-GaN insertion layer

被引:0
作者
Niu, Xuerui [1 ]
Hou, Bin [1 ]
Zhang, Meng [1 ]
Yang, Ling [1 ]
Wu, Mei [1 ]
Zhang, Xinchuang [2 ]
Jia, Fuchun [1 ]
Wang, Chong [1 ]
Ma, Xiaohua [1 ]
Hao, Yue [1 ]
机构
[1] Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Mat & Devices, Xian 710071, Peoples R China
[2] Xidian Univ, Sch Adv Mat & Nanotechnol, Xian 710071, Peoples R China
基金
中国国家自然科学基金; 中国博士后科学基金;
关键词
GaNa; double-channel heterostructure field-effect transistors; p-GaN insertion layer; C-doped buffer layer; ALGAN/GAN; HEMTS;
D O I
10.1088/1674-1056/acc7f4
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
GaN-based p-channel heterostructure field-effect transistors (p-HFETs) face significant constraints on on-state currents compared with n-channel high electron mobility transistors. In this work, we propose a novel double heterostructure which introduces an additional p-GaN insertion layer into traditional p-HFETs. The impact of the device structure on the hole densities and valence band energies of both the upper and lower channels is analyzed by using Silvaco TACD simulations, including the thickness of the upper AlGaN layer and the doping impurities and concentration in the GaN buffer layer, as well as the thickness and Mg-doping concentration in the p-GaN insertion layer. With the help of the p-GaN insertion layer, the C-doping concentration in the GaN buffer layer can be reduced, while the density of the two-dimensional hole gas in the lower channel is enhanced at the same time. This work suggests that a double heterostructure with a p-GaN insertion layer is a better approach to improve p-HFETs compared with those devices with C-doped buffer layer alone.
引用
收藏
页数:6
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